1995
DOI: 10.1109/20.490167
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Effect of microstructure on media noise of CoCrTa thin film media fabricated under ultra clean sputtering process

Abstract: Ultra clean sputtering process (UC-process) was introduced in the fabrication of Co,,Crl,,Ta&r thin f ¶lm media Magnetic properties, microstructure and their effect on media noise are discussed against the thickness of Cr underlayer. By applying the UGprocess, coerclve force Hc shows high values of about 2.3 kOe isotropically until 10 nm in Cr thickness. High He of about 1.5 kOe remains at even 2.5 nm. UC-process is found to enable the enhancement of the formation of Cr segregated grain boundary structure, whi… Show more

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Cited by 19 publications
(4 citation statements)
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“…In particular, a number of papers have reported a significant improvement in recording performance in Co-alloy media produced by ultraclean sputtering [7,10]. In recent work, we have shown that this improvement in recording performance lies in the reduction of crystallographic defects or stacking faults caused by residual nitrogen gas in the sputtering chamber [11].…”
Section: Introductionmentioning
confidence: 89%
“…In particular, a number of papers have reported a significant improvement in recording performance in Co-alloy media produced by ultraclean sputtering [7,10]. In recent work, we have shown that this improvement in recording performance lies in the reduction of crystallographic defects or stacking faults caused by residual nitrogen gas in the sputtering chamber [11].…”
Section: Introductionmentioning
confidence: 89%
“…Although the fabrication of single-domain nanocrystal particles might be achieved by various methods, [6][7][8][9] a Gaussian distribution of particle size may occur during the fabrication of thin films. It is difficult to obtain uniform singledomain particles.…”
Section: Introductionmentioning
confidence: 99%
“…These interfacial and microstructural conditions, which affects strongly these physical properties through intergranular magnetic coupling, should be exactly controlled in fabrication process. We have been proposing the new concept in controlling the microstructure, defined as ultra clean sputtering process (UC-process) and showing the remarkable magnetic properties induced [1][2][3][4][5][6][7][8][9]. In this paper, the relation between the cleanness during film deposition process and magnetic properties is widely reviewed in connection with their microstructures.…”
Section: Introducfionmentioning
confidence: 99%