Abstract:In this paper, the effect of proton and He particle bombardment in CsPbBr3 material was investigated by the Monte Carlo simulation including ion range, backscattering, vacancies and sputtering yield. The energies of proton and He particle varied from 50 keV to 180 keV and the particle incidence angles increased from 0o to 89.9o . The calculated results showed that with the increase of incidence energies, the range and vacancies increased, and the backscattering ions and sputtering yield reduced for proton and … Show more
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