Effect of laser incidence angle on the femtosecond laser ablation characteristics of silicon carbide ceramics

Chen, Jianbo; Chen, Xiaoxiao; Zhang, Xuanhua; Zhang, Wenwu

doi:10.1016/j.optlaseng.2023.107849

Cited by 1 publication

(1 citation statement)

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“…The polishing results of the original surface defects of SiC have a significant impact, and a small incident angle is more conducive to obtaining a smooth surface and significantly reducing the degree of oxidation and graphitization in the ablation zone [74]. Due to the different laser absorption rates and energy distribution of SiC at different laser incidence angles, the ablation threshold and morphology of SiC change with the change in the laser incidence angle [75].…”

Section: Large Surface Areasmentioning

confidence: 99%

A Review of Femtosecond Laser Processing of Silicon Carbide

Wang,

Zhang,

Chen

et al. 2024

Micromachines

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Silicon carbide (SiC) is a promising semiconductor material as well as a challenging material to machine, owing to its unique characteristics including high hardness, superior thermal conductivity, and chemical inertness. The ultrafast nature of femtosecond lasers enables precise and controlled material removal and modification, making them ideal for SiC processing. In this review, we aim to provide an overview of the process properties, progress, and applications by discussing the various methodologies involved in femtosecond laser processing of SiC. These methodologies encompass direct processing, composite processing, modification of the processing environment, beam shaping, etc. In addition, we have explored the myriad applications that arise from applying femtosecond laser processing to SiC. Furthermore, we highlight recent advancements, challenges, and future prospects in the field. This review provides as an important direction for exploring the progress of femtosecond laser micro/nano processing, in order to discuss the diversity of processes used for manufacturing SiC devices.

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Section: Large Surface Areasmentioning

confidence: 99%