A Review of Femtosecond Laser Processing of Silicon Carbide
Quanjing Wang,
Ru Zhang,
Qingkui Chen
et al.
Abstract:Silicon carbide (SiC) is a promising semiconductor material as well as a challenging material to machine, owing to its unique characteristics including high hardness, superior thermal conductivity, and chemical inertness. The ultrafast nature of femtosecond lasers enables precise and controlled material removal and modification, making them ideal for SiC processing. In this review, we aim to provide an overview of the process properties, progress, and applications by discussing the various methodologies involv… Show more
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