Effect of ionic oxygen concentration on properties of SiO2 and Ta2O5 monolayers deposited by ion beam sputtering

Chen, Chang; Wang, Yanzhi; Feng, Jijun; Wang, Wenwen; Chen, Yu; Lu, Yesheng; Zhang, Yuhui; Li, Dawei; Cui, Yun; Shao, Jianda

doi:10.1016/j.optmat.2022.113349

Cited by 4 publications

(3 citation statements)

References 41 publications

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“…Optical communication thin film filter is a type of thin film filter, and its manufacturing process is to use the principle of thin film evaporation, to use the method of physical gas deposition, and to use the principle of dielectric material to apply two kinds of medicinal materials SiO 2 and Ta 2 O 5 , which are exchanged layer by layer using the high voltage and low current of the electron gun. This generates high-voltage arcs, shooting on the medicinal materials [12][13][14][15], melting under vacuum to generate airflow heat convection, and so attaching the medicinal materials to the steam. The size of the substrate has three specifications: 95 mm, 150 mm, and 228 mm in diameter, and the number of evaporated layers of the finished product can be 200-300 layers.…”

Section: Industrial Background and Applications Of Optical Communicat...mentioning

confidence: 99%

“…When the testing object is placed in the heated test chamber with temperature T e (in a vacuum state at this time), its temperature T will gradually rise due to the absorption of radiant heat from the wall of the test chamber. According to the principle of energy conservation, the change of T in the heating process can be expressed and formatted as Equations ( 11) and (12) [42,43] as a differential equation:…”

Section: Establish a Mathematical Model With Temperature Changesmentioning

confidence: 99%

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Identification of the Yield Rate by a Hybrid Fuzzy Control PID-Based Four-Stage Model: A Case Study of Optical Filter Industry

Chen,

Hung,

Lee

et al. 2024

Axioms

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With the vigorous development of emerging technology and the advent of the Internet generation, high-speed Internet and fast transmission 5G wireless networks contribute to interpersonal communication. Now, the Internet has become popular and widely available, and human life is inseparable from various experiences on the Internet. Many base stations and data centers have been established to convert and switch from electrical transmission to optical transmission; thus, it is entering the new era of optical fiber networks and optical communication technologies. For optical communication, the manufacturing of components for the purpose of high-speed networks is a key process, and the requirement for the stability of its production conditions is very strict. In particular, product yields are always low due to the restriction of high-precision specifications associated with the limitations of too many factors. Given these reasons, this study proposes a hybrid fuzzy control-based model for industry data applications to organize advanced techniques of box-and-whisker plot method, association rule, and decision trees to find out the determinants that affect the yield rate of products and then use the fuzzy control Proportional-Integral-Derivative (PID) method to manage the determinants. Since it is unrealistic to test the real machine online operation at the manufacturing stage, the simulation software supersedes this for improved results, and a mathematical neural network is used to verify the given data to confirm whether its result is similar to that of the simulation. The study suggests that excessive temperature differentials between substrate and cavity can lead to low yields. It suggests using fuzzy control technology for temperature management, which could increase yield, reduce labor costs, and accelerate the transition to high-speed networks by mass-producing high-precision optical filters.

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Section: Industrial Background and Applications Of Optical Communicat...mentioning

confidence: 99%

Section: Establish a Mathematical Model With Temperature Changesmentioning

confidence: 99%

Identification of the Yield Rate by a Hybrid Fuzzy Control PID-Based Four-Stage Model: A Case Study of Optical Filter Industry

Chen,

Hung,

Lee

et al. 2024

Axioms

View full text Add to dashboard Cite

show abstract

“…This exacerbates the irradiation of initial damage areas, resulting in larger and more severe damage. The effects of atomic oxygen on thin film oxidation-reduction processes are approximately negligible during controlled oxygenation, since thin film materials are generally oxides (e.g., HfO2/SiO2) [23]. In addition, the primary structures of current laser radar systems often undergo optimization, sealing, shielding, and constant temperature control, thus minimizing the effects of thermal cycling and extensive volatile contamination.…”

Section: Introductionmentioning

confidence: 99%

The Influence of Space Environmental Factors on the Laser-induced Damage Thresholds in Optical Components

Ma,

Guan,

Yan

et al. 2024

High Pow Laser Sci Eng

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This paper systematically investigated the impact mechanisms of proton irradiation, atomic oxygen irradiation, and space debris collision, both individually and in combination, on the laser damage threshold and damage evolution characteristics of HfO2/SiO2 triple-band high-reflection films and fused silica substrates using a simulated near-earth space radiation experimental system. For the high-reflection film samples, the damage thresholds decreased by 15.38%, 13.12%, and 46.80% after proton, atomic oxygen, and simulated space debris (Penetration) irradiation, respectively. The coupling irradiation of the first two factors resulted in a decrease of 26.93%, while the combined effect of all

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(Sm/Eu/Tm)3+ doped tantalum semiconductor system for photovoltaic and electrochemical functionality amplification

Jaffri

Ahmad

Abrahams

et al. 2024

Journal of Rare Earths

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Effect of ionic oxygen concentration on properties of SiO2 and Ta2O5 monolayers deposited by ion beam sputtering

Cited by 4 publications

References 41 publications

Identification of the Yield Rate by a Hybrid Fuzzy Control PID-Based Four-Stage Model: A Case Study of Optical Filter Industry

Identification of the Yield Rate by a Hybrid Fuzzy Control PID-Based Four-Stage Model: A Case Study of Optical Filter Industry

The Influence of Space Environmental Factors on the Laser-induced Damage Thresholds in Optical Components

(Sm/Eu/Tm)3+ doped tantalum semiconductor system for photovoltaic and electrochemical functionality amplification

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