2019
DOI: 10.1016/j.vacuum.2019.04.037
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Effect of ion bombardment on the chemical properties of crystalline tantalum pentoxide films

Abstract: The effect of argon ion bombardment on the chemical properties of crystalline Ta2O5 films grown on Si(100) substrates by radio frequency magnetron sputtering was investigated by X-ray photoelectron spectroscopy. All samples were irradiated for several time intervals [(0.5, 3, 6, 9) min] and the Ta 4f and O 1s core levels were measured each time. Upon analysis at the surface of the films, we observe the Ta 4f spectrum characteristic of Ta2O5. Irradiated samples exhibit the formation of Ta suboxides with oxidat… Show more

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Cited by 17 publications
(3 citation statements)
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“…High-resolution XPS spectra of Ta 4f peaks for non-anodized and anodized samples are displayed in Figure . All peaks observed for XPS spectra of non-anodized and anodized samples were in line with literature findings. For the non-anodized tantalum, two peaks appeared at 21.9 and 23.8 eV, which belonged to Ta 4f 7/2 and Ta 4f 5/2 peaks of metallic tantalum, respectively (Figure a). For NT-min and NT-max samples (Figure b,c), aside from the metallic tantalum peaks, peaks at 29.4 eV for Ta 4f 5/2 and 27.5 eV for Ta 4f 7/2 were also observed.…”
Section: Results and Discussionsupporting
confidence: 88%
“…High-resolution XPS spectra of Ta 4f peaks for non-anodized and anodized samples are displayed in Figure . All peaks observed for XPS spectra of non-anodized and anodized samples were in line with literature findings. For the non-anodized tantalum, two peaks appeared at 21.9 and 23.8 eV, which belonged to Ta 4f 7/2 and Ta 4f 5/2 peaks of metallic tantalum, respectively (Figure a). For NT-min and NT-max samples (Figure b,c), aside from the metallic tantalum peaks, peaks at 29.4 eV for Ta 4f 5/2 and 27.5 eV for Ta 4f 7/2 were also observed.…”
Section: Results and Discussionsupporting
confidence: 88%
“…These devices are usually fabricated from corrosion-resistant materials, such as stainless steel (316 L), cobalt-chromium (Co-Cr), titanium alloys, platinum-iridium (Pt-Ir) alloys, tantalum (Ta) or nitinol (Ni-Ti) and are permanently implanted (Raab et al , 2020; Fu et al , 2022; Antanasova et al , 2018; Perez et al , 2019; della Valle et al , 2021; Dahiya et al , 2022). Traditional stent manufacturing techniques include etching, micro-electro discharge machining, electroforming, die-casting and laser cutting, as shown in Figure 1 (Wang et al , 2021; McGee et al , 2022).…”
Section: Introductionmentioning
confidence: 99%
“…Ta 2 O 5 coatings have an excellent biocompatibility, good dielectric properties, and high corrosion resistance [25]. E-gun technology permits corrosion resistance and uniform thin coatings of the angstrom order [26]. In general, physical vapor deposition methods are used for the optical coatings in the field of ophthalmic and precision optical coatings [27].…”
Section: Introductionmentioning
confidence: 99%