2016
DOI: 10.1016/j.proeng.2016.07.346
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Effect of Interface Trap States on Optical Barrier Height of NiSi/Si Infrared Detector

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“…For Ni‐Si, the Si 2p3/2 peak occurs at 99.48 eV which corresponds to the pure Si peak. [ 33,34 ] The Si 2p spectra of the Ni‐rich silicides, Ni 3 Si, and Ni‐Si exhibited a shoulder peak located at ≈103.4 eV, suggesting the formation of SiO 2 . [ 7 ] The minor oxidation trend could be due to the thermal treatment of the sample.…”
Section: Resultsmentioning
confidence: 99%
“…For Ni‐Si, the Si 2p3/2 peak occurs at 99.48 eV which corresponds to the pure Si peak. [ 33,34 ] The Si 2p spectra of the Ni‐rich silicides, Ni 3 Si, and Ni‐Si exhibited a shoulder peak located at ≈103.4 eV, suggesting the formation of SiO 2 . [ 7 ] The minor oxidation trend could be due to the thermal treatment of the sample.…”
Section: Resultsmentioning
confidence: 99%