Effect of Insulation Trenches on Micromachined Silicon Thermal Wind Sensors

Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; Qin, Ming; Huang, Qing‐An

doi:10.1109/jsen.2017.2766121

Cited by 18 publications

(7 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It features a novel heater control system that enables the flow sensor to operate in either CP or CTD. Compared to other work [30][33] [42], this sensor can toggle between those modes based on the flow rate measured. The toggling point has been determined as the point where the two modes' outputs are equal, and its choice has been justified based on smooth transition from one to the other.…”

Section: Discussionmentioning

confidence: 99%

A Smart Dual-Mode Calorimetric Flow Sensor

2020

View full text Add to dashboard Cite

A smart thermal flow sensor system is presented. It makes use of a novel heater control circuit which can automatically set the operating mode to either constant power or constant temperature difference. It overcomes the limitations of single-mode thermal flow sensors, such as temperature overshoots at low flow rates at constant power mode, or excessive power consumption at high flow rates at constant temperature difference mode. The system is especially useful for temperature sensitive and portable applications, such as respiratory monitoring for medical diagnostics. In this paper, detailed description of the sensor's design, implementation, and experimental validation are presented. The proposed dual-mode flow sensor achieves an overtemperature reduction up to 9.5% compared with thermal flow sensors operating in constant power mode alone, and a power reduction up to 13.6% compared with thermal flow sensors operating in constant temperature difference mode alone for the flow range of 0 to 50 slm while offering an improved overall sensitivity.

show abstract

Section: Discussionmentioning

confidence: 99%

A Smart Dual-Mode Calorimetric Flow Sensor

2020

View full text Add to dashboard Cite

show abstract

“…Therefore, a high sensitivity thin film based flow sensor was designed and fabricated [6]. Recently, insulation trenches technology has been introduced to improve sensitivity [7]. For the package aspect, the sensor is adhered to ceramic by conductive glue, which can protect the sensors from harsh environments [8,9].…”

Section: Introductionmentioning

confidence: 99%

Efficient system-level simulations of thermal wind sensors considering environmental factors

Wang¹,

Zhou²,

Yi³

et al. 2022

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

For the development of MEMS technology during the past several years, MEMS design has requirements of high precision, high efficiency, iterative design, joint design of structure and circuit and so on. With the improvement of thermal wind sensor performance requirements and the complexity of the application environment, it is becoming increasingly difficult to ignore the impact of environmental factors. However, there is no system-level model considering the influence of environmental factors adequately in macro model. To solve these problems, a 2-D thermal wind sensor macro model considering environmental factors is proposed. In order to build a macro model which can reflect the output of sensors in different environments, this paper, starting from the basic law of heat transfer, proposes an accurate macro model of the thermal wind sensor. The model proposed in this study accurately considers the influence of thermal and transport properties in different environments, and can be simulated together with the interface circuits in Cadence software. The results indicate that the variation of temperature and atmospheric pressure in the natural range can affect the sensor output by more than 15%, and the influence of relative humidity should not be ignored when the temperature is higher than 70 ℃. Furthermore, the flow direction over the sensor can be further studied according to the 2-D equivalent circuit model. The simulation results agree well with the experimental results, and the results can provide a valuable reference for the research and practical application of thermal wind sensors.

show abstract

“…It has several advantages, including a simple structure, low production cost, and a strong anti-interference ability, but it cannot meet people’s needs for portable devices due to its large size. Especially after the emergence of MEMS technology, the thermal anemometer began to attract the attention of researchers [ 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 ]. It has the advantages of miniaturization, high accuracy, and high sensitivity.…”

Section: Introductionmentioning

confidence: 99%

2.5D Flexible Wind Sensor Using Differential Plate Capacitors

Wan¹,

Yi²

2021

Sensors

Self Cite

View full text Add to dashboard Cite

In this paper, a novel 2.5-dimensional (2.5D) flexible wind sensor is proposed based on four differential plate capacitors. This design consists of a windward pillar, two electrode layers, and a support layer, which are all made of polydimethylsiloxane (PDMS) with different Young’s moduli. A 2 mm × 2 mm copper electrode array is located on each electrode layer, forming four parallel plate capacitors as the sensitive elements. The wind in the xy-plane tilts the windward pillar, decreasing two capacitances on the windward side and increasing two capacitances on the leeward side. The wind in the z-axis depresses the windward pillar, resulting in an increase of all four capacitances. Experiments demonstrate that this sensor can measure the wind speed up to 23.9 m/s and the wind direction over the full 360° range of the xy-plane. The sensitivities of wind speed are close to 4 fF·m−1·s and 3 fF·m−1·s in the xy-plane and z-axis, respectively.

show abstract

Effect of Insulation Trenches on Micromachined Silicon Thermal Wind Sensors

Cited by 18 publications

References 20 publications

A Smart Dual-Mode Calorimetric Flow Sensor

A Smart Dual-Mode Calorimetric Flow Sensor

Efficient system-level simulations of thermal wind sensors considering environmental factors

2.5D Flexible Wind Sensor Using Differential Plate Capacitors

Contact Info

Product

Resources

About