“…Thin films of GaMnN have been prepared through molecular-beam epitaxy (MBE) [55,[67][68][69][70][71][72][73][74][75][76][77][78][79][80][81][82][83] with a wide spread of substrate temperatures, deposition and annealing of a Mn-layer onto a GaN film [84,85], nebulised spray pyrolysis [86], metal organic chemical vapour deposition (MOCVD) [87,88], pulsed laser deposition (PLD) [89], Mn + [66,88,[90][91][92][93][94][95][96] or Mn + and N + [97] ion implantation into already-prepared GaN films. GaMnN has also been grown co-doped with a number of different elements [54,82,[98][99][100][101][102][103][104][105][106].…”