“…For this reason, the nanoindentation technique has been widely used to obtain mechanical characteristics, such as hardness, Young's modulus, and elastic/plastic deformation behaviors of various thin films [12,13]. The optimum parameters of magnetic properties, such as coercivity, saturation magnetization, remanence magnetization, and magnetic anisotropy, are strongly affected by the crystallinity, surface roughness, and film thickness of ferromagnetic materials, which growth parameters and the annealing process can tune [1,14]. In this study, the CoFeSm films were fabricated on glass substrates, and the influence between microstructural and optical properties of CoFeSm films with various film thicknesses and annealing temperatures was examined.…”