Effect of geometry error on accuracy of large-diameter pads used for CMP dressing

Ban, Xinxing; Zhao, Huiying; Zhao, Shijie; Xie, Ruiqing; Gu, Yawen; Zhu, Xiangzheng; Liao, Defeng; Li, L.; Jiang, Zhuangde

doi:10.1007/s00170-018-2797-9

Cited by 7 publications

(1 citation statement)

References 21 publications

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“…Plane lapping is used to produce the high-precision plane components required for integrated circuits, giant lasers, optical lenses, and other devices [1][2]. According to recent research, the evaluation criteria for lapping and polishing plane components (including material-removal rate, surface roughness, and flatness) are affected by the dressing of the lapping-and-polishing-pad surface [3][4][5]. Unless the lapping-and-polishing pad is continually dressed, it experiences glazing, passivation, and wear, gradually decreasing the process performance of the plane component [6].…”

Section: Introductionmentioning

confidence: 99%

A real-time dressing method for metal lapping pads based on the thermal deformation effect

Zhao

Wang

et al. 2022

Int J Adv Manuf Technol

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The surface shape and accuracy of the metal lapping pad are important factors that affect the performance of the lapping process for flat optical components. A real-time control system for metal-lapping-pad surface shape (RCLPS) based on the bimetal thermal-deformation effect is proposed. Unlike traditional dressing methods (e.g., turning dressing with a diamond tool), real-time dressing based on the RCLPS system is a material-loss-free and in-process dressing method. A full-aperture lapping turntable based on the RCLPS system was designed, and the working heat was analyzed. A thermal-deformation model was established through regression analysis. Finally, experiments were conducted to verify the functionality of the RCLPS system. During turning dressing (turntable rotational speed n m = 100 rpm), the thermal-deformation error caused by the working heat of the turntable-shaft system was compensated by the RCLPS system. During the lapping process for optical elements (n m ≤ 20 rpm), the real-time dressing of the lapping-pad surface shape was controlled by the coolant temperature of the RCLPS system, permitting optimization and adjustment of the process performance of the plane optical component. The effectiveness and practicality of the RCLPS system were demonstrated experimentally.

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Section: Introductionmentioning

confidence: 99%