Effect of Dimethylformamide, Current Density and Resistivity on Pore Geometry in P-type Macroporous Silicon

Haldar, Sandip; De, Avik; Chakraborty, Suparna; Ghosh, Sumana; Ghanta, Ujjwal

doi:10.1016/j.mspro.2014.07.326

Cited by 9 publications

(14 citation statements)

References 11 publications

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“…The etching rate for DMF-based 5% HF is high, compared to H 2 O-based 5% HF [29]. In this work, an aqueous electrolyte is composed of HF (49%), ethanol (95%), and DI water.…”

Section: Resultsmentioning

confidence: 99%

“…Halder et al , used dimethylformide (DMF) in HF to produce macropores with a current density of 3.5 mA/cm 2 [29]. They performed electrochemically etching of heavily doped <100> p-type silicon membranes with a resistivity of 3 Ω·cm.…”

Section: Introductionmentioning

confidence: 99%

“…Porosity of porous silicon membrane (n-type and p-type) is highly dependent on resistivity, concentration of HF in an aqueous electrolyte, and applied current density. Halder et al , used dimethylformide (DMF) in HF to produce macropores with a current density of 3.5 mA/cm 2 [ 29 ]. They performed electrochemically etching of heavily doped <100> p-type silicon membranes with a resistivity of 3 Ω·cm.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Khan

Williams

2015

Materials

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Nanopore-based analysis is currently an area of great interest in many disciplines with the potential for exceptionally versatile applications in medicine. This work presents a novel step towards fabrication of a single solid-state nanopore (SSSN) in a thin silicon membrane. Silicon nanopores are realized using multistep processes on both sides of n-type silicon-on-insulator (SOI) <100> wafer with resistivity 1–4 Ω·cm. An electrochemical HF etch with low current density (0.47 mA/cm2) is employed to produce SSSN. Blue LED is considered to emit light in a narrow band region which facilitates the etching procedure in a unilateral direction. This helps in production of straight nanopores in n-type Si. Additionally, a variety of pore diameters are demonstrated using different HF concentrations. Atomic force microscopy is used to demonstrate the surface morphology of the fabricated pores in non-contact mode. Pore edges exhibit a pronounced rounded shape and can offer high stability to fluidic artificial lipid bilayer to study membrane proteins. Electrochemically-fabricated SSSN has excellent smoothness and potential applications in diagnostics and pharmaceutical research on transmembrane proteins and label free detection.

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“…The etching rate for DMF-based 5% HF is high, compared to H 2 O-based 5% HF [29]. In this work, an aqueous electrolyte is composed of HF (49%), ethanol (95%), and DI water.…”

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Khan

Williams

2015

Materials

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“…However, certain applications in which pore walls will be biofunctionalized [10,11] or some molecules must penetrate the pores [12] require a bigger pore diameter. For this purpose, some organic solvents, such as dimethylformamide (DMF), are combined with HF to increase pore size during anodization [13,14].…”

Section: Introductionmentioning

confidence: 99%

Flow-Through Self-Standing Porous Silicon Sensor

Martín-Sánchez

Ponce-Alcántara

García-Rupérez

2018

5th International Electronic Conference on Sensors and Applications

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A self-standing porous silicon (PS) multilayer structure detached from the substrate by the lift-off method and integrated with a microfluidic cell is presented. Experiments of refractive index changes sensing flow through open-ended pores are reported. We continuously recorded the reflectance spectra of the PS membrane each 30 s and measured the shift as different substances flowed through the structure. The experimental sensitivity values are in good agreement with the theoretical simulations performed.

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“…Organic electrolytes. The combination of HF-based solutions with non-aqueous electrolytes, e.g., dimethylformamide and dimethylsulfoxide, facilitates the Si dissolution during anodization [14,15]. This method offers more control over the PS properties.…”

mentioning

confidence: 99%

Pore Morphology of Heavily Doped P-Type Porous Silicon

Martín-Sánchez

Ponce-Alcántara

García-Rupérez

2018

5th International Electronic Conference on Sensors and Applications

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Tuning the pore diameter of porous silicon (PS) is essential for some applications such as biosensing, where the pore size can filter the entrance of some analytes or increase its sensitivity. However, macropore (>50 nm) formation on p-type silicon is still poorly known due to the strong dependence on resistivity. Electrochemically etching heavily doped p-type silicon usually forms micropores (<5 nm), but it has been found that bigger sizes can be achieved by adding an organic solvent to the electrolyte. In this work, we present the results of using dimethylformamide (DMF), dimethylsulfoxide (DMSO), potassium hydroxide (KOH) and sodium hydroxide (NaOH) for macropore formation in p-type silicon with a resistivity between 0.001 and 0.02 Ω∙cm, achieving pore sizes from 5 to 100 nm.

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Effect of Dimethylformamide, Current Density and Resistivity on Pore Geometry in P-type Macroporous Silicon

Cited by 9 publications

References 11 publications

Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Flow-Through Self-Standing Porous Silicon Sensor

Pore Morphology of Heavily Doped P-Type Porous Silicon

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