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The structure of electrodes in the electrochemical formation cell of porous silicon greatly influences the planar uniformity of the porous silicon layer. In this paper a systematic study of the planar uniformity of large area porous silicon layer formed by different electrode structure is reported based on photoluminescence and reflectance scanning of the surface. A new design of the electrode structure is developed for achieving satisfactory planar uniformity of large area porous silicon layer.

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