2005
DOI: 10.1016/j.jcrysgro.2005.01.091
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Effect of diborane on the microstructure of boron-doped silicon nanowires

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Cited by 92 publications
(89 citation statements)
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“…[23] Diborane, trimethylboron, and PH 3 are gaseous compounds commonly used as dopants in a gas-phase synthesis of doped SiNWs through the so-called vapor-liquid-solid (VLS)-CVD method. [23][24][25][26] The post-doping process has advantages such as flexibility in the selection of the vapor-phase precursors for introducing dopant species and selective patterning of the doped SiNWs. [23] In our study we have applied the post-doping method and investigated the biocompatibility of the resulting doped SiNWs as compared with the as-grown undoped SiNWs.…”
Section: Resultsmentioning
confidence: 99%
“…[23] Diborane, trimethylboron, and PH 3 are gaseous compounds commonly used as dopants in a gas-phase synthesis of doped SiNWs through the so-called vapor-liquid-solid (VLS)-CVD method. [23][24][25][26] The post-doping process has advantages such as flexibility in the selection of the vapor-phase precursors for introducing dopant species and selective patterning of the doped SiNWs. [23] In our study we have applied the post-doping method and investigated the biocompatibility of the resulting doped SiNWs as compared with the as-grown undoped SiNWs.…”
Section: Resultsmentioning
confidence: 99%
“…That is, doping of VLS grown Si needles was demanded. In literature we find several reports [7,8] on VLS grown doped Si nanowires, having diameter in nanometer range, and their devices. However, considering our target applications (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6][7][8] In these studies, the effects of impurity doping were investigated mainly by electrical transport measurements. [1][2][3][4][5][6][7][8] The results showed a reduction in resistivity in doped SiNWs, suggesting that SiNWs are amenable to doping with impurity atoms. We recently investigated and characterized impurity doping in SiNWs synthesized by laser ablation.…”
mentioning
confidence: 99%