2015
DOI: 10.7498/aps.64.154214
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Effect of coating-induced polarization aberrations on the focusing properties in high numerical aperture optical system

Abstract: The incident angles of the optical systems with high numerical apertures, such as lithography or microscope, are larger than those of normal ones. For these systems, polarized illumination is widely adopted. The coatings on their surfaces will make s and p polarization components of oblique incident light experience diverse amplitudes and phase modulations, and induce extra polarization aberrations. We apply the vectorial diffraction theory to assess the effects of coating-induced polarization aberrations on t… Show more

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