Effect of boron concentration on the mechanical, tribological and corrosion properties of Ta–B–N films by reactive magnetron sputtering

Asempah, Isaac; Xu, Jie; Yu, Lihua; Wang, Lei

doi:10.1016/j.ceramint.2019.06.192

Cited by 15 publications

(3 citation statements)

References 44 publications

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“…The H/E* and H 3 /E* 2 of TaC are higher than TaN, and much higher than Ta. In the literature [7,20,[40][41][42][43][44][45][46][47][48][49], many elements were incorporated into TiN films to form TaMeN (Me: Zr, W, B, Al, MoAl, etc.) films, resulting in an improvement of H/E* and H 3 /E* 2 .…”

Section: Mechanical Propertiesmentioning

confidence: 99%

“…Figure 8. The H 3 /E* 2 ratios as a function of H/E* for TaN/(Ta/Ti)/TiN multilayer films and films containing Ta in the literature, in comparison with the values measured under nanoindentation [7,20,[40][41][42][43][44][45][46][47][48][49]. The average values of H/E* and H 3 /E* 2 ratios are plotted in the figure, and the error bars are used as numerical intervals.…”

Section: Tribological and Adhesive Propertiesmentioning

confidence: 99%

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Sandwich Structure to Enhance the Mechanical and Electrochemical Performance of TaN/(Ta/Ti)/TiN Multilayer Films Prepared by Multi-Arc Ion Plating

Yang

Yuan

et al. 2022

Coatings

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TaN/(Ta/Ti)/TiN multilayer films at various target to substrate distances (dts), composed of hexagonal TaN, (t-Ta/fcc-Ti) and fcc-TiN with a sandwich structure, were prepared via multi-arc ion plating. With increasing dts, the deposition rate of the films first increased and then decreased, and the average grain size increased from 11.9 to 13.9 nm and then decreased to 10.4 nm. The TaN/(Ta/Ti)/TiN multilayer films have a high ratio of hardness to elastic modulus (H/E*) and H3/E*2 ratios, displaying an outstanding level of both hardness and toughness compared with Ta-related films. The nano-multilayer TaTi interlayers inhibited the columnar structure and prolonged the corrosion diffusion path by increasing stable interfaces. The TaN/(Ta/Ti)/TiN multilayer film at dts = 220 mm exhibited comprehensive properties, including a high hardness of 25 GPa, strong adhesion strength of 68 N, low coefficient of friction of 0.41, low wear rate of 2.7 × 10−6 mm3(mN)−1 and great corrosion resistance in 3.5 wt% NaCl solution, showing promising application as a protective coating.

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Section: Mechanical Propertiesmentioning

confidence: 99%

Section: Tribological and Adhesive Propertiesmentioning

confidence: 99%

Sandwich Structure to Enhance the Mechanical and Electrochemical Performance of TaN/(Ta/Ti)/TiN Multilayer Films Prepared by Multi-Arc Ion Plating

Yang

Yuan

et al. 2022

Coatings

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“…A multilayer TaN coating has a higher hardness and lower friction coefficient than a single layer TaN coating. SEMPAH I et al found that grain refinement by boron addition improves the hardness of the TaN coating, and the friction coefficient decreases with the increase in boron content [ 18 ]. SERNA-MANRIQUE M D et al sputtered TaN coatings on 304 stainless steel items in a N 2 /Ar atmosphere [ 19 ].…”

Section: Introductionmentioning

confidence: 99%

Effect of Nitrogen Doping on Tribological Properties of Ta2O5 Coatings Deposited by RF Magnetron Sputtering

Chao

Cai

et al. 2022

Materials

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Ta2O5 was deposited on quartz glass and Si substrates as a protective coating. The inherent RF magnetron sputtering power of 140 W was maintained during the deposition process. During the deposition process, amounts of 5%, 10%, and 15% of N2 were injected, and the total sputtering gas (N2+Ar) flow was kept at 40 sccm. The microstructure and surface morphology of the coatings were characterized, and the friction and wear experiments of the coatings were carried out. The results show that the coatings’ surface is smooth and the main chemical compositions are Ta, O, and N. The maximum average roughness of the coatings was prepared by pure argon sputtering. It is proved that the introduction of N2 reduces the surface roughness of the coatings and increases the surface hardness and elastic modulus of the coatings. Adhesive wear and brittle fracture are the two main wear forms of coatings. The wear debris is mainly composed of columnar particles and a flake structure.

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Self-adaption Ta/TaC multilayer coating with fine grains: toward excellent corrosion resistance in aggressive environment

et al. 2021

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Effect of boron concentration on the mechanical, tribological and corrosion properties of Ta–B–N films by reactive magnetron sputtering

Cited by 15 publications

References 44 publications

Sandwich Structure to Enhance the Mechanical and Electrochemical Performance of TaN/(Ta/Ti)/TiN Multilayer Films Prepared by Multi-Arc Ion Plating

Sandwich Structure to Enhance the Mechanical and Electrochemical Performance of TaN/(Ta/Ti)/TiN Multilayer Films Prepared by Multi-Arc Ion Plating

Effect of Nitrogen Doping on Tribological Properties of Ta2O5 Coatings Deposited by RF Magnetron Sputtering

Self-adaption Ta/TaC multilayer coating with fine grains: toward excellent corrosion resistance in aggressive environment

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