Abstract:Ta2O5 was deposited on quartz glass and Si substrates as a protective coating. The inherent RF magnetron sputtering power of 140 W was maintained during the deposition process. During the deposition process, amounts of 5%, 10%, and 15% of N2 were injected, and the total sputtering gas (N2+Ar) flow was kept at 40 sccm. The microstructure and surface morphology of the coatings were characterized, and the friction and wear experiments of the coatings were carried out. The results show that the coatings’ surface i… Show more
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