2015
DOI: 10.1016/j.cirp.2015.04.097
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Effect of atmospheric-pressure plasma jet on polycrystalline diamond micro-milling of silicon carbide

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Cited by 34 publications
(15 citation statements)
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“…Comparison of the quality surfaces by micro-milling silicon carbide with a micro diamond tool evidenced the effect of applying a plasma jet in improving both the chip formation process and removing the surface contamination at the tool edge, obtaining a high-quality surface with a roughness Ra of 0.73nm [7].…”
Section: Micro-millingmentioning
confidence: 99%
“…Comparison of the quality surfaces by micro-milling silicon carbide with a micro diamond tool evidenced the effect of applying a plasma jet in improving both the chip formation process and removing the surface contamination at the tool edge, obtaining a high-quality surface with a roughness Ra of 0.73nm [7].…”
Section: Micro-millingmentioning
confidence: 99%
“…Atmospheric pressure plasma treatment (APPT) is conducive to the auxiliary cutting of some difficult-to-cut materials [13][14][15][16][17]. The atmospheric pressure plasma is rich in active particles and has a low temperature, which improves the metal surface wettability rapidly and improves the cooling and lubricating environment in the cutting area.…”
Section: Introductionmentioning
confidence: 99%
“…The cutting process is environmentally friendly, so it has a broad application prospect in the auxiliary precision machining of pure iron and other materials. Katahira et al [13] studied the micromilling of SiC with polycrystalline diamond tools. The surface roughness (Ra) of the workpiece could be reduced from 3.22 nm to 0.73 nm by atmospheric pressure plasma technology, and the polycrystalline diamond tool life could be improved.…”
Section: Introductionmentioning
confidence: 99%
“…Among the various machining methods, polishing is the last step to obtain good surface integrity. However, SiC ceramics have poor machinability due to their high hardness and brittleness [1,2,3,4]. The surface and subsurface damages may seriously deteriorate the quality of optical parts under thermal load during machining [5].…”
Section: Introductionmentioning
confidence: 99%