Cu
2
ZnSnS
4
(CZTS) is regarded as one of the
emerging materials for next-generation thin film solar cells. However,
its synthesis is complex, and obtaining a single-phase CZTS thin film
is difficult. This work reports the elaboration of Cu
2
ZnSnS
4
thin films by a sequential magnetron sputtering deposition
of Cu
2
SnS
3
(CTS) and ZnS as stacked films. Initially,
the CTS films were prepared on a soda lime glass substrate by annealing
Cu and SnS
2
stacked layers. Second, ZnS was deposited by
magnetron sputtering on the CTS films. The CTS\ZnS stacks were then
annealed in Sn + S or S atmospheres. The tetragonal CZTS structure
was obtained and confirmed by grazing incidence X-ray diffraction
and Raman spectroscopy. The morphological and compositional characteristics,
measured by scanning electron microscopy and energy-dispersive spectroscopy,
revealed large grains and dense surfaces with the elemental composition
close to the intended stoichiometry. Additional X-ray photoemission
spectroscopy measurements were performed to determine the surface
chemistry and particularities of the obtained films. The optical properties,
determined using conventional spectroscopy, showed optimal absorber
layer band gap values ranging between 1.38 and 1.50 eV. The electrical
measurements showed that all the films are p-type with high carrier
concentrations in the range of 10
15
to 10
20
cm
–3
. This new synthesis route for CZTS opens the way
to obtain high-quality films by an industry-compatible method.