1993
DOI: 10.1063/1.108664
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Effect of annealing on the interfaces of giant-magnetoresistance spin-valve structures

Abstract: Si/Ta/NiFe/Cu/NiFe/FeMn/Ta spin-valve layered structures were analyzed by x-ray reflectivity, before and after annealing at 240, 320, and 360 °C. Specularly reflected x-ray data were collected using a high-resolution reflectometer and were analyzed by least-squares refinement. The thicknesses of the individual layers in the NiFe/Cu/NiFe/FeMn magnetic sandwich remained essentially unchanged. With the exception of the FeMn/Ta interface, the widths of the buried interfaces increased rapidly with annealing tempera… Show more

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Cited by 76 publications
(22 citation statements)
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“…An increase of the total film thickness with annealing temperature due to the surface oxidation of the Ta capping layer was also found by Huang et al [10]. According to [10], Ta spontaneously oxidizes to a depth of about 2.5 nm. This is consistent with the features of the in-plane XRD patterns of the sensors shown in Fig.…”
Section: Structurementioning
confidence: 66%
“…An increase of the total film thickness with annealing temperature due to the surface oxidation of the Ta capping layer was also found by Huang et al [10]. According to [10], Ta spontaneously oxidizes to a depth of about 2.5 nm. This is consistent with the features of the in-plane XRD patterns of the sensors shown in Fig.…”
Section: Structurementioning
confidence: 66%
“…For significant structural changes to occur, the samples have to be annealed at high temperatures ͑200°C or more͒ for a long time ͑in the range of 1 h or more͒. 21,22 In our experiments, all of the measurements between 100 and 200°C were performed in a short time ͑less than half an hour in total͒. The effect of microstructural changes, we believe, were minimal and should not be responsible for the observed results.…”
Section: H Cmentioning
confidence: 90%
“…7 shows the GIXR results for this ZrN film deposited at T s ¼ 500 C, together with the fitting results. It has often been reported that good simulation fits can be achieved by ensuring that the model takes the interface layer into account [22,23]. Thus, we simulated the experimental data using a threelayer calculation model on the Si substrate that includes a surface layer on the ZrN film and a transition layer between the ZrN film and the Si substrate; the same model was used for the (0 0 1)ZrN/(0 0 1)Si system in our previous paper [11].…”
Section: Density Thickness and Surface Roughness Of The Epitaxial (1mentioning
confidence: 99%