In recent years, developing dopant-free carrier-selective contacts,
instead of heavily doped Si layer (either externally or internally), for
crystalline silicon (c-Si) solar cells have attracted considerable
interests with the aims to reduce parasitic light absorption and
fabrication cost. However, the stability still remains a big challenge
for dopant-free contacts, especially when thermal treatment is involved,
which limits their industrial adoption. In this study, a perovskite
material ZnTiO combining with an ultrathin
(~1 nm) SiO film and Al layer is used
as an electron-selective contact, forming an isotype heterojunction with
n-type c-Si. The perovskite/c-Si heterojunction solar cells exhibit a
performance-enhanced effect by post-metallization annealing when the
annealing temperature is 200-350 °C. Thanks to the post-annealing
treatment, an impressive efficiency of 22.0% has been demonstrated,
which is 3.5% in absolute value higher than that of the as-fabricated
solar cell. A detailed material and device characterization reveal that
post annealing leads to the diffusion of Al into ZnTiO
film, thus doping the film and reducing its work function. Besides, the
coverage of SiO is also improved. Both these two
factors contribute to the enhanced passivation effect and electron
selectivity of the ZnTiO -based contact, and hence
improve the cell performance.