Effect of aerosol chemical vapor deposition on characteristics of MoS2 particles

Low‐Temperature Atmospheric Pressure Plasma‐Enhanced CVD of Nanocomposite Coatings “Molybdenum Disulfide (Filler)–Silicon Oxide (Matrix)”

“…In refs. we have published the results of our detailed studies of the influence of the main process parameters on the structure, composition, and dimensional characteristics of disulfide molybdenum particles synthesized by spray pyrolysis of aerosol particle of solutions in the system “(NH 4 ) 2 MoS 4 –C 3 H 7 NO.” It should also be noted that we have carefully studied by FTIR spectroscopy the composition of the exhaust gases formed as a result of pyrolysis and the results obtained showed that one can expect little influence of the products on PECVD of silicon oxide. This suggestion was experimentally confirmed further in this paper by deposition of a matrix layer with a composition, which is close to amorphous silicon dioxide films with near stoichiometric composition.…”

“…However, analysis of published results shows that those reaction systems cannot be used in the dual reactor system because of the long period of time of tens of minutes required for complete interaction of the precursors or because of simultaneous deposition of disulfide layers in the reaction zone . The results of the preliminary studies have shown that MoS 2 nanoparticles can be homogeneously synthesized in a gas stream just by pyrolysis of aerosol particles of a solution containing a single source precursor—(NH 4 ) 2 MoS 4 . Dimethylformamide has been used as the solvent for the first time because of its high thermal stability and because it has a surface tension that is half that of water, which leads to the formation of a smaller aerosol particle size produced in the piezoelectric nebulizer .…”