2017
DOI: 10.1002/admi.201700241
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Low‐Temperature Atmospheric Pressure Plasma‐Enhanced CVD of Nanocomposite Coatings “Molybdenum Disulfide (Filler)–Silicon Oxide (Matrix)”

Abstract: The possibility of practical realization of a two‐stage chemical vapor deposition (CVD) process using as an example of nanocomposite coating “molybdenum disulfide (filler)–silicon oxide (matrix)” is experimentally demonstrated for the first time. Deposition is performed in a two‐zone vertical tubular quartz reactor. The formation of molybdenum disulfide nanoparticles by spray pyrolysis is carried out in the upper zone, and the lower zone is used for deposition of nanocomposite coatings by atmospheric pressure … Show more

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Cited by 15 publications
(14 citation statements)
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“…Extensive efforts have been paid in recent years to study the mechanical and tribological properties of IF/INT of WS 2 and MoS 2 . Few recent works were dedicated to the study of the tribological properties of IF-MoS 2 nanoparticles produced by laser ablation in solution; 133 plasma enhanced chemical vapor deposition (PECVD) 134 and microwave assisted synthesis. 135 Using laser ablation in solution resulted in IF nanoparticles with average size of 29 nm.…”
Section: Tribological Characterizationmentioning
confidence: 99%
“…Extensive efforts have been paid in recent years to study the mechanical and tribological properties of IF/INT of WS 2 and MoS 2 . Few recent works were dedicated to the study of the tribological properties of IF-MoS 2 nanoparticles produced by laser ablation in solution; 133 plasma enhanced chemical vapor deposition (PECVD) 134 and microwave assisted synthesis. 135 Using laser ablation in solution resulted in IF nanoparticles with average size of 29 nm.…”
Section: Tribological Characterizationmentioning
confidence: 99%
“…Here, 1 n s is the surface area of the single crystalline cell in the step. We note that eqn (7) is derived for the general case when both supersaturations of adatoms and advacancies are present. In this case (case 1), we treat x v ¼ 0, and thus the step rate of advancement depends only on the supersaturation in the gas phase (x a ) and interchange terms I a and I v :…”
Section: And a Chain Of Transformations (See Esi ‡) Wementioning
confidence: 99%
“…We note that this equation does not consider the effect of advacancies. For this, we may use the approach from Section 3.1 and eqn (7), which considers vacancy supersaturation x v . As shown in ref.…”
Section: Effect Of Mechanical Stressesmentioning
confidence: 99%
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“…Perovskites, which contain several components in a crystal lattice, are used to manufacture new-generation solar cells. Much attention is paid to two-dimensional materials such as molybdenum disulfide (MoS 2 ) , and different optical crystals . In view of the obvious variety of all possible crystalline compounds, few of which are known and studied to date, the number of multicomponent crystals involved in technology will only grow.…”
Section: Introductionmentioning
confidence: 99%