2003
DOI: 10.1117/12.459869
|View full text |Cite
|
Sign up to set email alerts
|

Edge effects with Preston equation

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
5

Citation Types

0
11
0

Year Published

2004
2004
2022
2022

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 20 publications
(11 citation statements)
references
References 0 publications
0
11
0
Order By: Relevance
“…R. A. Jones suggested a linear pressure distribution model in 1986 [8]. Luna-Aguilar, et al(2003) and Cordero-Davila, et al(2004) developed this approach further using a non-linear high pressure distribution near the edge-side of the workpiece, however they did not report the model's validity by demonstrating it using experimental evidence [13,14]. These analytical pressure distributions were fed into the Preston's equation, Eq.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…R. A. Jones suggested a linear pressure distribution model in 1986 [8]. Luna-Aguilar, et al(2003) and Cordero-Davila, et al(2004) developed this approach further using a non-linear high pressure distribution near the edge-side of the workpiece, however they did not report the model's validity by demonstrating it using experimental evidence [13,14]. These analytical pressure distributions were fed into the Preston's equation, Eq.…”
Section: Introductionmentioning
confidence: 99%
“…For any real polishing tool, the actual removal distribution is a complex function of many factors such as tool-workpiece configuration, tool stiffness, polishing compounds, polishing pad, and so forth. The analytical pressure distribution, p(x,y), approaches [8,13,14] tend to ignore some of these effects. Also, in the edge TIF cases, the linearity for Preston's equation may need to be re-considered since the pressure distribution changes in wide pressure value range.…”
Section: Introductionmentioning
confidence: 99%
“…Cordero-Dá vila et al 17 presented a new pressure distribution model to predict the edge effect while avoiding the negative pressure problem. For this model, the pressure is significantly higher at the border points of the glass.…”
Section: Introductionmentioning
confidence: 99%
“…In 1986, Jones suggested a linear model for the pressure distribution [3]. In 2004, Luna-Aguilar developed the skin model for the nonlinear approach [9]. In 2016, Nam reported the modified FEA model for accurate prediction of the pressure distribution [11].…”
Section: Introductionmentioning
confidence: 99%
“…Traditional opticians need to balance working parameters for various kinds of tools and workpieces to ensure a good clear aperture. Based on previous research results [6][7][8][9][10][11], the edge effect includes two parts:…”
Section: Introductionmentioning
confidence: 99%