“…Recently, much research has been carried out for synthesizing the high quality diamond thin-films using microwave plasma enhanced chemical vapor deposition (MWPCVD) [13][14][15][16][17], radio frequency (RF), DC plasma CVD [18,19], electron cyclotron resonance (ECR) plasma CVD [20][21][22], the hot filament CVD [23,24], the ion beam deposition method (IBD) [25], laser ablation, combustion flame, etc [26][27][28]. Generally, the low pressure CVD processes for synthesis of diamond films have been used with the activating gas phase carbon-containing precursor of CH 4 .…”