Early stage growth of amorphous thin film: Average kinetics, nanoscale dynamics, and pressure dependence

Wang, Chenyu; Ludwig, Karl; Wagenbach, Christa; Rainville, Meliha G.; Narayanan, Suresh; Zhou, Hua; Ulbrandt, Jeffrey G.; Headrick, Randall L.

doi:10.1103/physrevmaterials.6.045601

Phys. Rev. Materials

2022

DOI: 10.1103/physrevmaterials.6.045601

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Early stage growth of amorphous thin film: Average kinetics, nanoscale dynamics, and pressure dependence

Chenyu Wang

Karl Ludwig

Christa Wagenbach

et al.

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2024

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“…In contrast, the continuing increase in accelerator-based X-ray source brilliance has enabled the development of approaches measuring the evolution of the coherent X-ray scattering speckle pattern, which is a fingerprint of the unique sample microstructure at each moment in time . However, application of coherent X-ray scattering in a surface-sensitive mode during growth has significant experimental and analysis challenges and the approach is still in the early stages of development. − …”

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Coherent X-ray Spectroscopy Elucidates Nanoscale Dynamics of Plasma-Enhanced Thin-Film Growth

Myint,

Woodward,

Wang

et al. 2024

ACS Nano

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Sophisticated thin film growth techniques increasingly rely on the addition of a plasma component to open or widen a processing window, particularly at low temperatures. Taking advantage of continued increases in accelerator-based X-ray source brilliance, this real-time study uses X-ray Photon Correlation Spectroscopy (XPCS) to elucidate the nanoscale surface dynamics during Plasma-Enhanced Atomic Layer Deposition (PE-ALD) of an epitaxial indium nitride film. Ultrathin films are synthesized from repeated cycles of alternating self-limited surface reactions induced by temporally separated pulses of the material precursor and plasma reactant, allowing the influence of each on the evolving morphology to be examined. During the heteroepitaxial 3D growth examined here, sudden changes in the surface structure during initial film growth, consistent with numerous overlapping stress-relief events, are observed. When the film becomes continuous, the nanoscale surface morphology abruptly becomes long-lived with a correlation time spanning the period of the experiment. Throughout the growth experiment, there is a consistent repeating pattern of correlations associated with the cyclic growth process, which is modeled as transitions between different surface states. The plasma exposure does not simply freeze in a structure that is then built upon in subsequent cycles, but rather, there is considerable surface evolution during all phases of the growth cycle.

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mentioning

confidence: 99%

Coherent X-ray Spectroscopy Elucidates Nanoscale Dynamics of Plasma-Enhanced Thin-Film Growth

Myint,

Woodward,

Wang

et al. 2024

ACS Nano

Self Cite

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Early stage growth of amorphous thin film: Average kinetics, nanoscale dynamics, and pressure dependence

Cited by 1 publication

References 35 publications

Coherent X-ray Spectroscopy Elucidates Nanoscale Dynamics of Plasma-Enhanced Thin-Film Growth

Coherent X-ray Spectroscopy Elucidates Nanoscale Dynamics of Plasma-Enhanced Thin-Film Growth

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