2nd E.C. Photovoltaic Solar Energy Conference 1979
DOI: 10.1007/978-94-009-9487-4_14
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Early Assessment of the Photovoltaic Potentialities of RAD Polysilicon Sheets

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1981
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Cited by 5 publications
(2 citation statements)
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“…doping degrades the abruptness in the transition between the doping of the substrate and the epitaxial layer and also increases the background doping concentration in the epitaxial layers, many studies have been conducted in order to minimize autodoping effects during silicon vapor phase epitaxial growth (1)(2)(3)(4). These studies have shown that autodoping during vapor phase epitaxial growth arises primarily from (i) dopant outgassing into the vapor phase prior to the commencement of epitaxial growth, (ii) dopant evaporation from the back surface of the wafer during epitaxial growth, and (iii) dopant introduction into the gas phase due to substrate etching by halides during epitaxial growth.…”
Section: Introductionmentioning
confidence: 99%
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“…doping degrades the abruptness in the transition between the doping of the substrate and the epitaxial layer and also increases the background doping concentration in the epitaxial layers, many studies have been conducted in order to minimize autodoping effects during silicon vapor phase epitaxial growth (1)(2)(3)(4). These studies have shown that autodoping during vapor phase epitaxial growth arises primarily from (i) dopant outgassing into the vapor phase prior to the commencement of epitaxial growth, (ii) dopant evaporation from the back surface of the wafer during epitaxial growth, and (iii) dopant introduction into the gas phase due to substrate etching by halides during epitaxial growth.…”
Section: Introductionmentioning
confidence: 99%
“…The interest in the preparation of photovoltaic silicon solar cells via inexpensive processes has resulted in the publication of a variety of studies dealing with the growth of silicon onto nonsilicon substrates, particularly graphite (1)(2)(3)(4). One of the main problems in the chemical vapor deposition (CVD) of silicon onto foreign substrates is the poor erystallinity of the grown layers.…”
mentioning
confidence: 99%