Periodic structures with micro-or sub-micrometer resolution can be used to improve the mechanical, biological, or optical properties of surfaces. Direct laser interference patterning combines high resolution (sub-micrometer feature sizes) with high fabrication speed. New processing heads for highspeed laser interference patterning of polycarbonate are introduced, which provide effective patterning speeds up to 0.9 m 2 min -1 . The surface topography of the processed polymer is analyzed by confocal microscopy and scanning electron microscopy. Focused ion beam is used to create cross-sections to determine the structuring mechanism. Finally, high-speed interference patterning is compared to conventional direct laser writing.