Dynamics of a close-loop controlled MEMS resonator

Abstract

The dynamics of a close-loop electrostatic MEMS resonator, proposed as a platform for ultra sensitive mass sensors, is investigated. The parameter space of the resonator actuation voltage is investigated to determine the optimal operating regions. side each of the potential wells and around both wells. The optimal region in the parameter space for mass sensing purposes is determined. In that region, steadystate chaotic attractors develop and spend most of the time in the safe lower well while occasionally visiting the upper well. The robustness of the chaotic attractors in that region is demonstrated by studying their basins of attraction. Further, regions of large dynamic amplification are also identified in the parameter space. In these regions, the resonator can be used as an efficient long-stroke actuator.

A MEMS autonomous switched oscillator

“…At large displacements, and including nonlinearities, the electrostatic autonomous MEMS impact resonator was demonstrated in periodic and aperiodic regimes [2]. Expanding on this, we report an autonomous oscillator with a displacement-dependent resistive switch that, in difference to the device from [3], does not require a periodic actuation. It works in autonomous vibration / self-switching.…”

“…It works in autonomous vibration / self-switching. Applications for such a nonlinear oscillator range from chaotic signals [4], sensitive mass sensors [3], to arrays for computation and signal processing [5].…”

Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates

“…As a result, a new limit cycle with a period twice the period of the excitation frequency will be generated. This phenomenon usually leads to a transition to chaos and at ultimately, failure of the system [34,36].…”

Effect of size on the chaotic behavior of nano resonators

“…Micro-beams are the most commonly used structural component in MEMS [2]. Electrostatically actuated micro-beams are major components of a wide range of devices such as accelerometers [3], signal processing devices [4], RF switches [5] and variety of resonant sensors such as mass sensors [6] and temperature sensors [7]. There are many sources of nonlinearities in MEMS due to forcing, damping and stiffness such as parallel-plate electrostatic forces, squeeze-film damping and mid-plane stretching respectively [5,8].…”