Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates

Abstract

Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order model based on an energy approach is formulated. It has been shown that nonlinear dynamics of an electrically actuated micro-plate, in the presence of differential pressure, significantly differs from those under purely electrostatic loads. The micro-plate may lose stability upon either saddle-node or period-doubling bifurcations. It has also been found that in the presence of a differential pressure, increasing the DC or AC voltages may surprisingly help to stabilize the motion of the micro-plate.

Global dynamics and integrity of a micro-plate pressure sensor

“…Note that Φ 0 (ρ) is a 4 th order polynomial representation of the first linear mode shape of the plate [20]. Next, the total potential of the system can be obtained as a function of the displacement components and their derivatives.…”

“…Within the elastic potential, a nonlinear term accounts for finite defections of the electrode. The combination of these two nonlinearities eventually results in a softening or hardening nonlinear dynamic behaviour [20].…”

Nonlinear dynamic identification of graphene’s elastic modulus via reduced order modeling of atomistic simulations

“…In fact, the stiffness of a membrane in small deflections is dominated by its pretension. In large deflections, an additional nonlinear geometrical stiffness appears in the elastic potential of the system and hence, in the obtained set of equations of motion [11,25]. As a result, nonlinear effects emerge in the frequency response of the system as a change in the frequency of the peak amplitude.…”

Frequency characteristics of a GPL-reinforced composite microdisk coupled with a piezoelectric layer

“…They showed that increasing the value fraction of the reinforcement causes to improve the vibrational behavior and strength of the FG circular structure. Sajadi et al [67] investigated the nonlinear vibrational behavior and stability of the circular microplate which was actuated by an electrical field and forced with pressure. Their result showed that the effect of electro-mechanical loading on the stability and instability of the structure is less than the effect of pure mechanical loading.…”