Dynamical theory of X‐ray diffraction by multilayered structures with microdefects

Abstract

The dynamical recurrence relation for amplitudes of coherent waves in the multilayered structure with Coulomb‐type defects (2D and 3D defects or microdefects) has been derived and the expression for the diffuse component of reflection coefficient of this structure has been obtained with account for the dynamical redistribution of intensities of transmitted and diffracted coherent waves in each layer. The derived formulas, which self‐consistently take into account both the diffuse scattering contribution to the diffracted intensity and its extinction due to diffuse scattering, have been applied to analyze the rocking curve of InGaAs/GaAs multilayered structure with quantum well. Layer thicknesses and chemical compositions as well as strains and concentration profiles of chemical elements in layers have been found. Additionally, characteristics of dislocation loops in the substrate of the multilayered structure have been determined. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

X-­ray diagnostics of the structure of near­surface layers of ion­implanted monocrystalline materials

“…The analysis of near-surface layers of single crystals is currently carried out by means of the kinematic theory of X-ray scattering [6], dynamic theories based on the Takagi equations [7][8][9], and by means of the statistical dynamical theory of X-ray scattering [10,11]. The statistical dynamical theory makes it possible to take into account the presence of specific types of defects in the structure and does not impose a limit on the size of the defect.…”

Quantum-Mechanical Model of Interconsistent Amplitude and Dispersion Influences of Structure Imperfections on the Multiple Scattering Pattern for Mapping and Characterization of Strains and Defects in Ion-Implanted Garnet Films

“…The expression for the coherent component of the reflection coefficient R coh () for imperfect crystal has been derived elsewhere earlier [7] and takes into account all the dynamical scattering effects including the extinction of Bragg waves due to diffuse scattering by defects as well as dispersion mechanism of influence of a sample structure on multiple-scattering pattern. Particularly, the dynamical consideration is necessary in the case of X-ray diffraction by the implanted YIG films of thickness, which is of the order of an extinction length.…”

“…Function r diff (k) in Eq. (3) represents the diffuse component of the differential reflection coefficient of the multilayer sample (containing M layers) after integration over vertical divergence [7]:…”

Unique Informativity of the Diffuse Dynamical Combined Diffractometry of Materials and Products of Nanotechnologies

“…Так, в работе [73] метод ДДКД был обобщен на случай гетероструктур и применен к многослойной системе с квантовой ямой (КЯ) In x Ga 1−x As 1−y N y (рис. 28).…”