Dynamic Operational Stress Measurement of MEMS Using Time-Resolved Raman Spectroscopy

Pomeroy, James W.; Gkotsis, Petros; Zhu, Meiling; Leighton, Glenn J. T.; Kirby, Paul B.; Kuball, Martin

doi:10.1109/jmems.2008.2004849

Cited by 17 publications

(13 citation statements)

References 25 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Room temperature resonant mechanical vibrations with ≈10 nm RMS amplitude induce unexpectedly large time-averaged tensile strains up to ≈ 4 × 10 −4 . Realistic improvements of our setup, including phase-resolved Raman measurements 35 , 36 could permit to probe dynamical strain in finer detail, including in the linear regime, where the effective coupling strength 28 could be extracted. For this purpose, larger resonant displacements may be achieved at cryogenic temperatures.…”

Section: Discussionmentioning

confidence: 99%

“…Recently, the interplay between electrostatically-induced strain and doping has been probed in the static regime in suspended graphene monolayers 34 . Dynamically-induced strain has been investigated using Raman spectroscopy in bulkier micro electro-mechanical systems 35 , 36 , including mesoscopic graphite cantilevers 37 but remains unexplored in resonators made from 2D materials.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Dynamically-enhanced strain in atomically thin resonators

et al. 2020

View full text Add to dashboard Cite

Graphene and related two-dimensional (2D) materials associate remarkable mechanical, electronic, optical and phononic properties. As such, 2D materials are promising for hybrid systems that couple their elementary excitations (excitons, phonons) to their macroscopic mechanical modes. These built-in systems may yield enhanced strain-mediated coupling compared to bulkier architectures, e.g., comprising a single quantum emitter coupled to a nano-mechanical resonator. Here, using micro-Raman spectroscopy on pristine monolayer graphene drums, we demonstrate that the macroscopic flexural vibrations of graphene induce dynamical optical phonon softening. This softening is an unambiguous fingerprint of dynamically-induced tensile strain that reaches values up to ≈4 × 10−4 under strong non-linear driving. Such non-linearly enhanced strain exceeds the values predicted for harmonic vibrations with the same root mean square (RMS) amplitude by more than one order of magnitude. Our work holds promise for dynamical strain engineering and dynamical strain-mediated control of light-matter interactions in 2D materials and related heterostructures.

show abstract

Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Dynamically-enhanced strain in atomically thin resonators

et al. 2020

View full text Add to dashboard Cite

show abstract

“…For instance, a readout of the mechanical resonance of few-layer graphene cantilevers through the frequency of the Raman features has recently been demonstrated 13 . A stimulating challenge is now to implement a real-time readout 55,56 of the mechanical resonances of nanosystems based on Raman scattering spectroscopy.…”

Section: Discussionmentioning

confidence: 99%

All-Optical Blister Test of Suspended Graphene Using Micro-Raman Spectroscopy

et al. 2014

View full text Add to dashboard Cite

We report a comprehensive micro-Raman study of a pressurized suspended graphene membrane that hermetically seals a circular pit, etched in a Si/SiO2 substrate. Placing the sample under a uniform pressure load results in bulging of the graphene membrane and subsequent softening of the main Raman features, due to tensile strain. In such a microcavity, the intensity of the Raman features depends very sensitively on the distance between the graphene membrane and the Si substrate, which acts as the bottom mirror of the cavity. Thus, a spatially resolved analysis of the intensity of the G-and 2D-mode features as a function of the pressure load permits a direct reconstruction of the blister profile. An average strain is then deduced at each pressure load, and Grüneisen parameters of 1.8 ± 0.2 and 2.4 ± 0.2 are determined for the Raman G and 2D modes, respectively. In addition, the measured blister height is proportional to the cubic root of the pressure load, as predicted theoretically. The validation of this scaling provides a direct and accurate determination the Young's modulus of graphene with a purely optical, hence contactless and minimally invasive, approach. We find a Young's modulus of (1.05 ± 0.10) TPa for monolayer graphene, in a perfect match with previous nanoindentation measurements. This all-optical methodology opens avenues for pressure sensing using graphene and could readily be adapted to other emerging two-dimensional materials and nanoresonators.

show abstract

“…Pomeroy et al [15] developed a dynamic-stress analysis method, based on time resolved micro-Raman spectroscopy, for reliability studies of microelectromechanical systems. Also, Jadaan et al [16] designed a probabilistic Weibull methodology to understand the behavior and mechanical properties of MEMS brittle materials.…”

Section: Previous Efforts On Mems Reliabilitymentioning

confidence: 99%

On MEMS Reliability and Failure Mechanisms

Fonseca

Sequera

2011

Journal of Quality and Reliability Engineering

View full text Add to dashboard Cite

Microelectromechanical systems (MEMS) are a fast-growing field in microelectronics. MEMS are commonly used as actuators and sensors with a wide variety of applications in health care, automotives, and the military. The MEMS production cycle can be classified as three basic steps: (1) design process, (2) manufacturing process, and (3) operating cycle. Several studies have been conducted for steps (1) and (2); however, information regarding operational failure modes in MEMS is lacking. This paper discusses reliability in the context of MEMS functionality. It also presents a brief review of the most relevant failure mechanisms for MEMS.

show abstract

Dynamic Operational Stress Measurement of MEMS Using Time-Resolved Raman Spectroscopy

Cited by 17 publications

References 25 publications

Dynamically-enhanced strain in atomically thin resonators

Dynamically-enhanced strain in atomically thin resonators

All-Optical Blister Test of Suspended Graphene Using Micro-Raman Spectroscopy

On MEMS Reliability and Failure Mechanisms

Contact Info

Product

Resources

About