2021
DOI: 10.1016/j.actamat.2021.116819
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Dynamic observation of dislocation evolution and interaction with twin boundaries in silicon crystal growth using in – situ synchrotron X-ray diffraction imaging

Abstract: The grown-in dislocation dynamics and interaction mechanisms with growth twins are investigated in-situ during the directional solidification of silicon crystal. The melting, solidification and cooling down process is performed in a dedicated installation at the European synchrotron radiation facility and is fol-lowed by X-ray Bragg diffraction imaging techniques (X-ray topography) at the mesoscale in real-time. Existing dislocations in the seed are observed to propagate in the up-grown crystal via replicas. T… Show more

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Cited by 17 publications
(4 citation statements)
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“…As shown in Figure 2a, as well as in the squared area of 10 mm × 10 mm in Figure S1c (Supporting Information), we could successfully identify the grain in which a dislocation cluster generates, by 3D reconstruction using the processed PL and optical images. The shape of dislocation clusters elongated along the growth direction, as previously reported, [24,25,43] suggesting that they were generated and enlarged just below the solid-liquid interface.…”
Section: Resultssupporting
confidence: 82%
“…As shown in Figure 2a, as well as in the squared area of 10 mm × 10 mm in Figure S1c (Supporting Information), we could successfully identify the grain in which a dislocation cluster generates, by 3D reconstruction using the processed PL and optical images. The shape of dislocation clusters elongated along the growth direction, as previously reported, [24,25,43] suggesting that they were generated and enlarged just below the solid-liquid interface.…”
Section: Resultssupporting
confidence: 82%
“…Dislocation dynamics studies suggested that the crystallographic performance of silicon is related to the dislocation behaviors [ 45 ]. Research and direct observations [ 46 , 47 ] about silicon crystal have also indicated that the slip of dislocations is related to fracture and strength reduction.…”
Section: Resultsmentioning
confidence: 99%
“…Both edge dislocations and screw dislocations are part of the misalignment of atomic arrangement in the crystal, and the slip direction and dislocation line are vertical and parallel, respectively. 66 Since excessive dislocations can interact with electrons to inhibit the formation of vacancies and lead to reduced charge transport efficiency, 67 controlling the concentration of dislocations is very important in semiconductors with line defects. The Williamson–Hall (W–H) method 68 is used to estimate the dislocation density ( δ ) value of a semiconductor by using the formula ε = β cos θ /4 (Stokes–Wilson equation) δ = 1/ D 2 .…”
Section: Defect Categories In Pec Systemsmentioning
confidence: 99%