Dynamic modeling of superresolution photoinduced-inhibition nanolithography

Gan, Zongsong; Jia, Baohua; Gu, Miṅ

doi:10.1364/oe.20.016871

Cited by 20 publications

(13 citation statements)

References 24 publications

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“…The possibility to print on demand complex (micro)structures with high refractive index ( n ) and tailored bandgap can find interesting applications in the fields of optics, photonics, optical coatings, and telecommunications . There are many inorganic materials characterized by a high n that were successfully employed to create functional 3D structures via DLW (e.g., chalcogenide glasses, PbSe, and LiNbO 3 ), yet such materials will not be discussed in this review as the mechanism from which these structures are formed differ from multiphoton polymerizations.…”

Section: Nanocompositesmentioning

confidence: 99%

Functional Materials for Two‐Photon Polymerization in Microfabrication

Carlotti

Mattoli

2019

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The creation of 3D micro and nanostructures is of particular interest in the fields of photonics, [3] microelectromechanical systems (MEMS), [4] metamaterials, [5] micro/ nanofluidics, [6] cellular proliferation, and differentiation. [7] To create 3D objects of arbitrary shape, 3D printing techniques offer many versatile solutions. [8] Among these, direct laser writing (DLW) allows for the simple preparation of (sub)micrometric objects and patterns with a resolution that can go below 100 nm. [9][10][11] DLW is an additive manufacturing technique based on twophoton polymerization (2PP). To produce a structure, a fs-pulsed long-wavelength laser is focused, by means of optical elements, in a photosensitive resin which is able to crosslink (negative photoresist) or decompose (positive photoresist) under an energetic radiation but that is also transparent at the laser wavelength: if the intensity of the excitation radiation is high enough-as it is the case in the focus-the resin can undergo two (or more)-photon absorption and polymerize (or decompose). [12] Such multiphotons absorption phenomena are nonlinear and the cross-section of the different materials scales with the square (or higher) of the intensity of the radiation. For these reasons, the laser beam can enter the photoresist without being absorbed and trigger the photochemical process(es) only in a small volume around the focus. This volume is named "voxel" being the 3D analogue of a 2D pixel. [13] The absorption probability outside of the voxel is small, thus suppressing the propagation of the reaction and resulting in fine resolution. By moving around the voxel, one can obtain complex 3D structures that can be isolated after developing. [14,15] More than two decades have passed since DLW was proposed [16] and much progress has been made in terms of improving feature size and resolution, [9,[17][18][19][20][21] enlarging the library of materials that can be used, [22][23][24][25] and the possible applications of these finely controlled structures. [6,[25][26][27][28] The research on functional materials-here intended as materials that can be employed in 2PP and show peculiar features that encourage their use in particular applications-has propelled the field of micro/nanostructuring forward by promoting the interdisciplinarity between chemistry, physics, biology, and material science. [26] In this review, we will summarize and critically discuss the different functional materials proposed in the literature, dividing them and confronting them according to their preparation and their application (Figure 1; Table 1). We start the main body discussing the properties and applications of nanocomposite resists used in 2PP. In the second part, Direct laser writing methods based on two-photon polymerization (2PP) are powerful tools for the on-demand printing of precise and complex 3D architectures at the micro and nanometer scale. While much progress was made to increase the resolution and the feature size throughout the years, by carefully designing a material, one...

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Section: Nanocompositesmentioning

confidence: 99%

Functional Materials for Two‐Photon Polymerization in Microfabrication

Carlotti

Mattoli

2019

Small

162

126

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“…Incorporation of super‐resolution fabrication with DLW has the potential to achieve fabrication feature sizes with deep‐subwavelength resolution . Recent work employing stimulated emission depletion (STED) DLW has approached a lateral resolution of 50 nm whereas a single‐photon photoinhibited polymerisation DLW has demonstrated a lateral resolution of 40 nm . Super‐resolution fabrication with DLW thus has the promise to realise dielectric nanostructures with resolution comparable to the e‐beam lithography.…”

Section: Electroless Metal Coatingmentioning

confidence: 99%

Fabrication methods of 3D periodic metallic nano/microstructures for photonics applications

Hossain

2013

Laser & Photonics Reviews

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Periodic metallic nano/microstructures have received a great a deal of attention in the photonics research community over the last few decades due to their intriguing optical properties. Three‐dimensional metallic nano/microstructures such as metallic photonic crystals, metamaterials, and plasmonic devices possess unique characteristics of tailored thermal radiation, negative refraction and deep subwavelength confinement of light. In this article, the recent progress on the experimental methods for the realisation of three‐dimensional periodic metallic and thin metal film coated dielectric nano/microstructures operating from optical to mid‐infrared frequencies has been reviewed. Advancement of the state‐of‐the‐art nanofabrication methods over the last few decades have led to the development of metallic nano/microstructures of diverse geometries, high resolution features and large scale production. The recent progress in the novel fabrication methods have inspired the development of functional and exciting photonic devices based on periodic metallic nano/microstructures with various applications in photonics including communications, photovoltaics, and biophotonics.

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“…Multiphoton lithography is an ultimate approach to 3D nanofabrication, but lacks resolution below 100 nm ( 9 , 12 ). Here, using optical two-beam super-resolution lithography ( 21 , 22 ), we demonstrate that this recently developed technique can fabricate biomimetic photonic structures with superior resolution, uniformity, and controllability.…”

Section: Introductionmentioning

confidence: 99%