Fabrication methods of 3D periodic metallic nano/microstructures for photonics applications

Abstract

Periodic metallic nano/microstructures have received a great a deal of attention in the photonics research community over the last few decades due to their intriguing optical properties. Three‐dimensional metallic nano/microstructures such as metallic photonic crystals, metamaterials, and plasmonic devices possess unique characteristics of tailored thermal radiation, negative refraction and deep subwavelength confinement of light. In this article, the recent progress on the experimental methods for the realisation of three‐dimensional periodic metallic and thin metal film coated dielectric nano/microstructures operating from optical to mid‐infrared frequencies has been reviewed. Advancement of the state‐of‐the‐art nanofabrication methods over the last few decades have led to the development of metallic nano/microstructures of diverse geometries, high resolution features and large scale production. The recent progress in the novel fabrication methods have inspired the development of functional and exciting photonic devices based on periodic metallic nano/microstructures with various applications in photonics including communications, photovoltaics, and biophotonics.

Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications

“…Nonlinear absorption induced photopolymerization at the focus of a femtosecond laser beam is a powerful and facile technique for fabricating a variety of micro-and nanostructures [12,[232][233][234][235][236][237][238][239][240][241][242]. Compared to the case of one-photon polymerization, the diffraction limit can be exceeded by nonlinear effects in the multiphoton polymerization to give a subdiffraction limit spatial resolution [243].…”

Tipping solutions: emerging 3D nano-fabrication/ -imaging technologies

“…More advanced laser fabrication methods can reach sub-micron resolution by exploiting nonlinear processes, such as multiphoton polymerization [19][20][21] and stimulated emission depletion techniques [22,23]. A variety of laser-made structures and their applications have been summarized in reviews covering the topic [24,25]. By using critical point drying (CPD), which allows the elimination of capillary forces in the wet development of laser exposed polymers, it is now possible to reliably fabricate 3D structures with 100 nm structural units in 3D, as demonstrated for photonic crystals [26].…”

Microfabrication of 3D metallic interconnects via direct laser writing and chemical metallization

“…Also, it should allow to create complex metallic microstructures for applications in plasmonics [50], metamaterials [51], and photonics [52], to mention a few.…”