Dynamic modeling and control of a novel XY positioning stage for semiconductor packaging

Abstract

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Design of a Piezoelectric-Actuated Microgripper With a Three-Stage Flexure-Based Amplification

“…Let the real and imaginary parts be equal, respectively, and thus the following equations can be obtained: In the four-bar linkage mechanism, the linkages FG, GH and HI have the initial angular positions of φ 5 , φ 6 , and φ 7 , respectively. The length of the linkages is L i (i=FG, GH, IH, FI, IJ).…”

“…ECENTLY the trend towards miniaturizing products such as Micro-Electro-Mechanical System(MEMS) has stimulated extensive research on automated micro manipulation and assembly techniques [1]- [6], and the development of miniaturized system for manipulating and assembling micro objects has become a great challenge for the precision engineering future [7]. Compared with other contact and contactless micro manipulation and assembly techniques, such as optical, electrostatic, Bernoulli, ultrasonic and magnetic, microgrippers are more preferred, because of their ability to grasp different shaped objects with high precision and low cost [8].…”

Development of a high speed and precision wire clamp with both position and force regulations

“…However, their applications are limited in the fast and precision wire clamp control because of the computationally expensive calculations [23] . Sliding mode control has the advantages of fast response and strong robustness for the disturbances, and thus exhibits great potential for the control of high-speed precision wire clamps [24] This paper presents the mechanism and robust position/force switching control of a novel monolithic piezoelectric actuated wire clamp.…”

A Flexure-Based Kinematically Decoupled Micropositioning Stage With a Centimeter Range Dedicated to Micro/Nano Manufacturing

“…igh speed precision positioning stages play an important role in micro/nano academic research and industrial manufacturing, where a micro/nanometer-scale resolution with motion strokes over tens of millimeters is a big challenge for the applications such as microelectronicmechanical and biomedical device manufacturing [1]- [5].…”