A Flexure-Based Kinematically Decoupled Micropositioning Stage With a Centimeter Range Dedicated to Micro/Nano Manufacturing

Wang, Fujun; Liang, Cunman; Tian, Yanling; Zhao, Xingyu; Zhang, Dawei

doi:10.1109/tmech.2015.2490803

Cited by 52 publications

(11 citation statements)

References 27 publications

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“…The dynamic model and analytical fundamental frequency of several flexure-beam-guided XY and XYZ nanopositioners were directly established by using Lagrange's equation by Yong and coworkers [167][168][169]. Other similar investigations can refer to the works by Tian and coworkers [265][266][267][268] for several kinds of flexure mechanisms. For some compliant mechanisms with complex configurations, exact solutions of kinematics are difficult; thus, approximate kinematics was employed.…”

Section: Dynamic Modeling Of Compliant Mechanismsmentioning

confidence: 99%

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Ling

Howell

Cao

et al. 2020

Applied Mechanics Reviews

150

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Flexure-based compliant mechanisms are becoming increasingly promising in precision engineering, robotics, and other applications due to the excellent advantages of no friction, no backlash, no wear, and minimal requirement of assembly. Because compliant mechanisms have inherent coupling of kinematic-mechanical behaviors with large deflections and/or complex serial-parallel configurations, the kinetostatic and dynamic analyses are challenging in comparison to their rigid-body counterparts. To address these challenges, a variety of techniques have been reported in a growing stream of publications. This paper surveys and compares the conceptual ideas, key advances, and applicable scopes, and open problems of the state-of-the-art kinetostatic and dynamic modeling methods for compliant mechanisms in terms of small and large deflections. Future challenges are discussed and new opportunities for extended study are highlighted as well. The presented review provides a guide on how to select suitable modeling approaches for those engaged in the field of compliant mechanisms.

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Section: Dynamic Modeling Of Compliant Mechanismsmentioning

confidence: 99%

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Ling

Howell

Cao

et al. 2020

Applied Mechanics Reviews

150

View full text Add to dashboard Cite

show abstract

“…Motion decoupling is an important factor that would significantly influence the performance of multi-DOF positioning. In macro positioning stages, the motion decoupling can be realized through conventional kinematic pairs, which usually has a certain degree of freedom of movement [29,30], but things are different in micro/nano compliant stages. In order to eliminate the influence of friction and backlash, flexure hinges are adopted, and parallel kinematic configuration is commonly used because of its outstanding performance, but along with the problem of output motion coupling [16].…”

Section: Mechanical Designmentioning

confidence: 99%

A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier

Wang

Huo

Liang

et al. 2019

IEEE Trans. Ind. Electron.

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“…The compliance matrix of the leaf-spring hinge in the local coordinate is given as following: [32][33][34]…”

Section: B the Flexible Suspension Mechanismmentioning

confidence: 99%

A novel method and system for calibrating the spring constant of atomic force microscope cantilever based on electromagnetic actuation

Tian

Zhou

Wang

et al. 2018

Review of Scientific Instruments

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It is crucial to calibrate atomic force microscope (AFM) cantilevers for the development and further applications of AFM in precision engineering such as nanonewton force measurement. This paper presents a novel approach to calibrate the spring constant of AFM cantilever based on electromagnetic actuation and null position measurement. According to the method, a calibration system was designed. In order to optimize the static and dynamic characteristics of the calibration system, the analytical models for the electromagnetic force and the suspension mechanism stiffness have been developed. Finite Element Analysis (FEA) has been utilized to further investigate the precision of analytical modeling. The null position measurement method was utilized to monitor the deformation of the flexible beam, and then the deformation was compensated by the electromagnetic force. Experiments were carried out based on the developed prototype, and the results show that the electromagnetic force conversion rate is 40.08 μN/mA. Finally, a typical AFM cantilever was calibrated and the spring constant is (30.83 ± 0.24) N/m. The uncertainty of the proposed null position measurement method is better than 0.78%, which verifies the effectiveness and feasibility of the calibration method and system. I. INTRODUCTION With the rapid development of micro/nano manufacturing, more and more attention has been paid to the micro/nano newton force measurement. 1-3 Atomic force microscope (AFM) has been becoming more and more important for the measurement of the modulus of polymers, 4 the strength of chemical bonds, 5 and the intermolecular interaction force between single molecule. 6 The interaction force between the tip and the sample surface can be measured through the deflection of probe cantilever and the Hook's law. 7 Thus, the calibration of the spring constant of cantilever has become one of the major concerns, especially in the quantitative measurement of micro-scale force. 8 There are variety kinds of probes utilized with different shapes and functions. Unfortunately, the spring

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A Flexure-Based Kinematically Decoupled Micropositioning Stage With a Centimeter Range Dedicated to Micro/Nano Manufacturing

Cited by 52 publications

References 27 publications

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier

A novel method and system for calibrating the spring constant of atomic force microscope cantilever based on electromagnetic actuation

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