Dynamic Interferometry for On-Machine Metrology

Morris, Michael North

doi:10.1364/fio.2010.stua3

Cited by 2 publications

(1 citation statement)

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“…This technique has been successfully implemented in commercial vibration insensitive Twyman-Green and Fizeau interferometers with wavelengths from the infrared through UV. [5][6][7][8][9] This paper presents a portable, high precision, vibration immune surface roughness profiler which utilizes 4D Technology's pixelated phase mask sensor. This paper is arranged in the following manner.…”

Section: Introductionmentioning

confidence: 99%

Dynamic surface roughness profiler

2012

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A dynamic profiler is presented that is capable of precision measurement of surface roughness in the presence of significant vibration or motion. Utilizing a special CCD camera incorporating a micro-polarizer array and a proprietary LED source, quantitative measurements were obtained with exposure times of <100 µsec. The polarization-based interferometer utilizes an adjustable input polarization state to optimize fringe contrast and signal to noise for measurement of optical surfaces ranging in reflectivity from 1 to 100%. A new phase calculation algorithm is presented that nearly eliminates phase-dependent errors resulting in shot noise limited performance. In addition to its vibration immunity, the system's light weight, <5 kg, compact envelope, 24 x 24 x 8 cm, integrated alignment system, and multiple mounting options facilitate use both directly resting on large optical surfaces and directly mounted to polishing equipment, stands, gantries and robots. Measurement results presented show an RMS repeatability <0.005 nm and an RMS precision < 0.1nm which are achieved without active vibration isolation.

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Section: Introductionmentioning

confidence: 99%