Dynamic deformation of scanning mirrors

Conant, Robert A.; Nee, Julia; Lau, K.Y.; Muller, R.S.

doi:10.1109/omems.2000.879621

Cited by 28 publications

(19 citation statements)

References 2 publications

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“…The lateral position and size of the laser spot can be changed simultaneously by the fabricated device. Under our experimental condition at 400 Hz, the dynamic deformation of the mirror was calculated by using the theoretical equation in [26] and [27]. The dynamic deformation was less than 1 nm, which was much smaller than the precision required for the varifocal mirror.…”

Section: Simultaneous Actuation Test Of Scanner and Varifocal Mirrormentioning

confidence: 93%

Varifocal Micromirror Integrated With Comb-Drive Scanner on Silicon-on-Insulator Wafer

Sasaki

Hane

2012

J. Microelectromech. Syst.

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We present a varifocal scanning micromirror fabricated from a silicon-on-insulator wafer. The varifocal scanning micromirror consists of a varifocal mirror with a rotational scanning function. The scanner and varifocal mirror are driven by comb and parallel-plate electrostatic actuators, respectively. The mirror rotates 5.5 • at 45 V in static mode. The curvature of the varifocal mirror is changed from −4 m −1 (−128-mm focal length) to +5 m −1 (+93-mm focal length) by applying a voltage from 0 to 50 V. It is confirmed that the lateral position and spot size of the reflected laser beam from the varifocal scanning micromirror are changed simultaneously. Moreover, confocal sensing is demonstrated using a fiber-optic system with the proposed mirror.[2011-0307.R1]Index Terms-Comb-drive actuator, confocal microscope, electrostatic actuator, micromirror, scanner, silicon on insulator (SOI), varifocal mirror.

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Section: Simultaneous Actuation Test Of Scanner and Varifocal Mirrormentioning

confidence: 93%

Varifocal Micromirror Integrated With Comb-Drive Scanner on Silicon-on-Insulator Wafer

Sasaki

Hane

2012

J. Microelectromech. Syst.

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“…The scanners were fabricated from SOI wafers, essentially providing two SCS structural layers: the top silicon layer, used to define thinner torsion bars, and the entire substrate thickness of 300 µm used to stiffen the mirror against deformation caused by residual stress and dynamic operation. (For analysis and discussion of dynamic deformation in MEMS scanners, see Conant et al [53] and Urey et al [54] ) A combination of DRIE and wet anisotropic etching was used for the top layer and the substrate, respectively. The mirror coils were formed from electroplated copper, and sensing coils of sputtered aluminum were added to provide closed-loop feedback for accurate mirror positioning.…”

Section: Scanning Mirrors With Magnetic and Electromagnetic Actuatorsmentioning

confidence: 99%

Free-Space Optical MEMS

Wu¹,

Patterson²

2006

Mems

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“…Figure 6a shows a SEM photograph of a surface-micromachined mirror and Figure 6b demonstrates the measured mirror deformation at 3120Hz (at 0rad phase delay compared to the input signal). Details of BSAC investigations of micromirrors have been published in [5,6,16,17]. The first full three-dimensional motion characterization with MSIS was performed to study a hard-disk drive [18].…”

Section: Characterization Of Mems: Examplesmentioning

confidence: 99%

<title>Optical measurement methods to study dynamic behavior in MEMS</title>

Rembe

Kant

Muller

2001

Microsystems Engineering: Metrology and Inspection

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The maturing designs of moving microelectromechanical systems (MEMS) make it more-and-more important to have precise measurements and visual means to characterize dynamic microstructures. The Berkeley Sensor&Actuator Center (BSAC) has a forefront project aimed at developing these capabilities and at providing high-speed Internet (Supernet) access for remote use of its facilities. Already in operation are three optical-characterization tools: a stroboscopic-interferometer system, a computer-microvision system, and a laser-Doppler vibrometer. This paper describes precision and limitations of these systems and discusses their further development. In addition, we describe the results of experimental studies on the different MEMS devices, and give an overview about high-speed visualization of rapidly moving MEMS structures.

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Dynamic deformation of scanning mirrors

Cited by 28 publications

References 2 publications

Varifocal Micromirror Integrated With Comb-Drive Scanner on Silicon-on-Insulator Wafer

Varifocal Micromirror Integrated With Comb-Drive Scanner on Silicon-on-Insulator Wafer

Free-Space Optical MEMS

<title>Optical measurement methods to study dynamic behavior in MEMS</title>

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