Dynamic Analysis of Scratch System of Grating Ruling Machine

Abstract

A high quality diffraction grating not only depends on the location accuracy of the positioning stage fixing the grating blank, but also the groove straightness error of the scratch system. As a key of diffraction grating fabrication technology at the nanometer scale, more attention should be paid to the dynamic characteristic of the scratch system. In this paper, both theoretical analysis and model simulation are carried out in order to study the vibration performance of the vibration source (slider crank mechanism) and knife-bridge. Moreover, the multi-body dynamics analysis of the knife-bridge is also calculated.