2021
DOI: 10.1016/j.apsadv.2021.100129
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Duplex treatment of active screen plasma nitriding and amorphous hydrogenated carbon coating

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Cited by 3 publications
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“…The AS provides heat and reactive species to the workload in a cold wall reactor. The discharge power dissipating at the workload is significantly lower, which results in an improvement of treatment homogeneity [10]. The treatment conditions are controlled by the discharge power and the composition of the feed gas.…”
Section: Introductionmentioning
confidence: 99%
“…The AS provides heat and reactive species to the workload in a cold wall reactor. The discharge power dissipating at the workload is significantly lower, which results in an improvement of treatment homogeneity [10]. The treatment conditions are controlled by the discharge power and the composition of the feed gas.…”
Section: Introductionmentioning
confidence: 99%