Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production

Bogdanov, A. L.; Holmqvist, Tommy; Jedrasik, Piotr; Nilsson, B.

doi:10.1016/s0167-9317(03)00093-5

Cited by 5 publications

(2 citation statements)

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“…Therefore, a new patterning technology is necessary to overcome the limitation of the optical lithography. [1,2,3] Among several new patterning technologies, electron-beam lithography can lead to the further reduction in the minimum feature size from 0.5 ㎛ ∼ 1.0 ㎛ by the conventional optical lithography to less than 100nm. However, electron-beam lithography requires longer process times than the optical lithography technology.…”

Section: Introductionmentioning

confidence: 99%

“…(1) Reusable quartz master can be reused in the electroplating process for the stamper fabrication, while conventional master with photoresist cannot be reused. (2) In the electroplating process, electroplating solution can permeate the interface between photoresist and quartz substrate of the conventional master with photoresist, while the reusable quartz master are free from the permeability of electroplating solution. Therefore precise stamper can be fabricated using reusable quartz master.…”

Section: Introductionmentioning

confidence: 99%

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Nano Pattern Mold Technology Using Nano Stamper Based on Quartz

Choi

Seo

et al. 2005

KEM

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In this paper, we present a reusable quartz master fabricated by electron-beam lithography and the results of the preliminary test of injection molding using the reusable quartz master. Since patterned structures of photoresist can be easily damaged by demolding process of nickel stamper and master, a master with photoresist cannot be reused in stamper fabrication process. In this work, we have made it possible of the repeated use of master by directly patterning on quartz in nickel stamper fabrication process. We have developed a 100nm-pit sized reusable quartz master with intaglio carving patterns of finer sizes than those of DVD (400nm) and blue-ray disc (200nm). In the preliminary test of the injection molding, we have found optimum injection molding conditions using polypropylene.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Nano Pattern Mold Technology Using Nano Stamper Based on Quartz

Choi

Seo

et al. 2005

KEM

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Nanotechnology for Biomedical Devices

Montelius

2003

Nanotechnologies for the Life Sciences

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The sections in this article are Introduction Nanotechnologies Overview of Nanotechnologies and Nanotools NIL Other Lithography Techniques Scanning Probes Applications Introduction Biomedical Applications based on Nanostructured Passive Surfaces Separation, Concentration and Enriching Structures Molecular Motors Transported in Nanometer Channels Topographical Structures, Cells and Guidance of Neurons Biomedical Applications utilizing Active Nanostructured Surfaces Protein Chips Protein Interactions Biomedical Applications using Nanowires Biomedical Applications using Nanoparticles Biomedical Applications using SPM Technology Imaging of Biomolecules using SPM Force Detection of Single Molecular Events Cantilever‐based Detection of Molecular Events Discussion and Outlook Acknowledgments

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