1999
DOI: 10.1016/s0924-4247(98)00247-7
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Dual-axis microgyroscope with closed-loop detection

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Cited by 40 publications
(19 citation statements)
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“…_ ) has to be constructed, prior to the decision of torque drive, M , is made. The forcerebalance operation is an algorithm which has been successfully employed in industries for the desired demodulation (An, Oh, Park, Lee, and Song 1999). By force-rebalance approach, the amplitude of the sense mode is continually monitored and then suppressed to zero so that the control signal itself has, in fact, the composition of the exerted angular rate ).…”
Section: Goals Of Control Loopsmentioning
confidence: 99%
“…_ ) has to be constructed, prior to the decision of torque drive, M , is made. The forcerebalance operation is an algorithm which has been successfully employed in industries for the desired demodulation (An, Oh, Park, Lee, and Song 1999). By force-rebalance approach, the amplitude of the sense mode is continually monitored and then suppressed to zero so that the control signal itself has, in fact, the composition of the exerted angular rate ).…”
Section: Goals Of Control Loopsmentioning
confidence: 99%
“…This OIS differs from the previous designs (Yeom 2009;Chiu et al 2007;Tu et al 2009;Yu and Liu 2008) that stabilizes the lens holder by two-DOF translational mechanism. As compared to the translational one (Chen et al 2003;An et al 1999), the proposed rotational OIS is in small and slim size (only 11 mm 9 11 mm 9 8 mm) in order to be installed in mobile phones with favorable performance for compensating hand shocks. The dynamic of the OIS has been analyzed in this study and the sliding mode control (SMC) has been applied to realize the controller.…”
Section: Introductionmentioning
confidence: 99%
“…In order to meet this trend as well as the requirement of high performance, extremely compact size, low power operation, and low cost angular rate sensors, considerable interest in design and fabrication of micromechanical gyroscopes [1][2] has been attracted. Normally, the micromechanical gyroscope can be driven by electrostatic [3][4], electromagnetic [5][6][7] or piezoelectric [8][9], which can measure the angular rate or the rotation angle by integrating the measured angular rate with respect to time. These gyroscopes have inspiriting parts and sensing parts, so their structures are complex.…”
Section: Introductionmentioning
confidence: 99%