Dry‐etching‐assisted femtosecond laser machining

Liu, Xueqing; Chen, Qi‐Dai; Guan, Kai-Min; Ma, Zhuo‐Chen; Yu, Yan-Hao; Li, Qiankun; Tian, Zhen‐Nan; Sun, Hong–Bo

doi:10.1002/lpor.201600115

Cited by 80 publications

(43 citation statements)

References 29 publications

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“…In 2017, X. Liu et al proposed a dry etching assisted femtosecond laser machining (DE-FsLM) method. Since the power required for the laser-modified material was lower than the power required for laser ablation, the manufacturing efficiency can be improved to form a complicated 2.5D structure [211]. Figure 23 illustrated the use of a femtosecond laser to modify and then perform a dry etch process to fabricate the microstructure.…”

Section: D and 3d Micro/nano Structures By Laser-assisted Processingmentioning

confidence: 99%

The Fabrication of Micro/Nano Structures by Laser Machining

Yang

Wei

et al. 2019

Nanomaterials

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Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

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Section: D and 3d Micro/nano Structures By Laser-assisted Processingmentioning

confidence: 99%

The Fabrication of Micro/Nano Structures by Laser Machining

Yang

Wei

et al. 2019

Nanomaterials

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“…Taking advantages of well controllability, high precision, wide range of processable materials and compatibility with semiconductor manufacturing of dry etching, Liu et al 97 firstly proposed the dry-etching-assisted femtosecond laser modification technology to process hard materials, which also includes two steps: femtosecond laser modification for pattern definition and subsequent ICP etching for structures developing, as the schematic diagram shown in Fig. 8(a).…”

Section: Dry-etching-assisted Femtosecond Laser Modificationmentioning

confidence: 99%

Etching-assisted femtosecond laser modification of hard materials

Liu

Bai

Chen

et al. 2019

Opto-Electronic Advances

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With high hardness, high thermal and chemical stability and excellent optical performance, hard materials exhibit great potential applications in various fields, especially in harsh conditions. Femtosecond laser ablation has the capability to fabricate three-dimensional micro/nanostructures in hard materials. However, the low efficiency, low precision and high surface roughness are the main stumbling blocks for femtosecond laser processing of hard materials. So far, etching-assisted femtosecond laser modification has demonstrated to be the efficient strategy to solve the above problems when processing hard materials, including wet etching and dry etching. In this review, femtosecond laser modification that would influence the etching selectivity is introduced. The fundamental and recent applications of the two kinds of etching assisted femtosecond laser modification technologies are summarized. In addition, the challenges and application prospects of these technologies are discussed.

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“…Recently, due to its high precision and three‐dimensional (3D) processing capabilities, the femtosecond laser fabrication has become widely used in the fabrication of complex 3D micro/nanostructures . Annealing and chemical etching after the laser ablation/modification are always necessary to decrease the surface roughness of microstructures fabricated on hard materials . Based on these methods, fused silica glass microlenses and silicon microlenses can be realized with high controllability.…”

Section: Introductionmentioning

confidence: 99%

Optical Nanofabrication of Concave Microlens Arrays

Liu

Lei

Yang

et al. 2019

Laser & Photonics Reviews

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For the simple and versatile fabrication of nanosmooth finished microlens arrays on hard materials, an approach combining femtosecond laser modification with subsequent ion beam etching is demonstrated. This method is based on the dependence of the plasma etching rate on the laser fluence used to modify the surface. The fabricated microlenses exhibit a low surface roughness of approximately 2.5 nm, due to the high precision of the plasma etching and benefit from the smooth interface between the laser‐modified and pristine subsurface regions. Microlenses with focal lengths ranging from 60 to 100 µm are realized by controlling the laser fluence, exposure dose, and etching time. Uniform square and hexagonal microlens arrays are fabricated on both hard and ultrahard materials and glasses (fused silica, GaAs, SiC, diamond) by the same process and deliver high‐quality focusing and imaging.

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Dry‐etching‐assisted femtosecond laser machining

Cited by 80 publications

References 29 publications

The Fabrication of Micro/Nano Structures by Laser Machining

The Fabrication of Micro/Nano Structures by Laser Machining

Etching-assisted femtosecond laser modification of hard materials

Optical Nanofabrication of Concave Microlens Arrays

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