2000
DOI: 10.1149/1.1393608
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Drift Phenomenon of Capacitive-Type Relative Humidity Sensors in a Hot and Humid Atmosphere

Abstract: Capacitive-type relative humidity sensors have been widely used. However, it is known that the output of the sensor gradually increases to a greater or lesser degree by aging of the sensor in a hot and humid atmosphere. [1][2][3][4][5] While the magnitude of such drift depends on the type of sensing polymers used, the origin of the drift has not yet been made clear. An understanding of this drift phenomenon and its implications is essential for preparing a stable and reliable capacitive-type humidity sensor.Th… Show more

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Cited by 17 publications
(6 citation statements)
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“…Indeed, one of problems of CAB sensors is commonly instabilities in the sensor RH characteristics if the sensor is left in a high temperature and high humidity environment for extended periods [16].…”
Section: Long-term Stabilitymentioning
confidence: 99%
“…Indeed, one of problems of CAB sensors is commonly instabilities in the sensor RH characteristics if the sensor is left in a high temperature and high humidity environment for extended periods [16].…”
Section: Long-term Stabilitymentioning
confidence: 99%
“…Polyimide is one of the most widely used polymers in various fields, such as the aerospace, 7) automotive, 8) and electronics industries, and is used in numerous applications including humidity sensors, 9) thin-film transistors, 10) and long-term storage, 11) because of its significant mechanical, thermal, electrical, and chemical properties. Recently, the use of polyimide films in the field of biotechnology for tissue engineering has been proposed.…”
Section: Introductionmentioning
confidence: 99%
“…As mentioned before, one proved mechanism of change in water sorption ability induced by aging was the introduction of the hydrophilic oxygen-containing group in the surface region of the sensing polymers. 6 If this is the only mechanism, then we would have observed a larger drift for the thinner films. In fact, the opposite result was obtained in this study as shown in Fig.…”
Section: Resultsmentioning
confidence: 83%
“…Among many possible factors that may contribute to the sensor's drift, we revealed that the drift of the sensor capacitance was closely related to the increase in the water sorption ability of the sensing polymers. 6 In that work, the increase in water sorption ability was attributed to the introduction of the oxygen-containing group at the surface of the sensing polymers. In addition, volumetric change by the swelling of the film in such an atmosphere may also be suggested.…”
mentioning
confidence: 95%