2013
DOI: 10.1063/1.4772020
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Doping incorporation paths in catalyst-free Be-doped GaAs nanowires

Abstract: The incorporation paths of Be in GaAs nanowires grown by the Ga-assisted method in molecular beam epitaxy have been investigated by electrical measurements of nanowires with different doping profiles. We find that Be atoms incorporate preferentially via the nanowire side facets, while the incorporation path through the Ga droplet is negligible. We also show that Be can diffuse into the volume of the nanowire giving an alternative incorporation path. This work is an important step towards controlled doping of n… Show more

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Cited by 65 publications
(91 citation statements)
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“…The gallium nominal growth rate was 900 nm h 21 , the substrate temperature was 630 8C and the V/III ratio was 4 (refs 43,44). The p-doping of the core was achieved by adding a flux of beryllium during axial growth 45 . Cores were annealed for 10 min at 630 8C.…”
Section: Methodsmentioning
confidence: 99%
“…The gallium nominal growth rate was 900 nm h 21 , the substrate temperature was 630 8C and the V/III ratio was 4 (refs 43,44). The p-doping of the core was achieved by adding a flux of beryllium during axial growth 45 . Cores were annealed for 10 min at 630 8C.…”
Section: Methodsmentioning
confidence: 99%
“…Our GaAs nanowires are readily doped p-type with Be, which incorporates preferentially via the nanowire side facets enabling structures with an undoped core and Be-doped shell [25]. A Be-doped shell provides an ideal interface for AuBe contacts with narrow Schottky barrier and thereby p-type NWFETs with low resistance ohmic contacts.…”
Section: Resultsmentioning
confidence: 99%
“…This makes the Schottky barrier depletion region very narrow, raising the electron tunnelling probability and giving a linear I-V characteristic for the contact. This can be assisted by doping the semiconductor local to the contact by other means, e.g., by ion-implantation [28], or during growth [25,29].…”
Section: Resultsmentioning
confidence: 99%
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“…The core was obtained by the self-catalysed Ga-assisted process (VLS) [34][35][36][37], with a nominal gallium growth rate of 0.27 μm/h, for 45 min, at T = 630°C and V/III beam equivalent flux ratio of 60. The p-doping was achieved with a beryllium flux corresponding to a doping level of 3.5 × 10 19 atoms/cm 3 for planar growth [38]. The core diameter was about 120 nm.…”
Section: Nanowire Growthmentioning
confidence: 99%