2007
DOI: 10.1021/nl0717107
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Doping-Free Fabrication of Carbon Nanotube Based Ballistic CMOS Devices and Circuits

Abstract: We have fabricated ballistic n-type carbon nanotube (CNT)-based field-effect transistors (FETs) by contacting semiconducting single wall CNTs using Sc. Together with the demonstrated ballistic p-type CNT FETs using Pd contacts, our work closes the gap for doping-free fabrication of CNT-based ballistic complementary metal-oxide semiconductor (CMOS) devices and circuits. We demonstrated the feasibility of this dopingfree CMOS technology by fabricating a simple CMOS inverter on a SiO 2 /Si substrate using the bac… Show more

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Cited by 319 publications
(298 citation statements)
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“…The extracted Schottky barrier heights are low for Pd (hole barrier) and Sc (electron barrier) and agree well with some of the experimental results. 67,76 The crystallographic structure of the metal surface is also important with up to 0.2 eV difference in Schottky barrier height between different orientations. 77 It has been concluded that a junction where Al is bonded to the end of a CNT has a considerably higher Schottky barrier compared to a side bonded configuration.…”
Section: B Density Functional Theory Modelingmentioning
confidence: 99%
See 1 more Smart Citation
“…The extracted Schottky barrier heights are low for Pd (hole barrier) and Sc (electron barrier) and agree well with some of the experimental results. 67,76 The crystallographic structure of the metal surface is also important with up to 0.2 eV difference in Schottky barrier height between different orientations. 77 It has been concluded that a junction where Al is bonded to the end of a CNT has a considerably higher Schottky barrier compared to a side bonded configuration.…”
Section: B Density Functional Theory Modelingmentioning
confidence: 99%
“…The best n-type CNTFETs fabricated without doping use Sc or Y as contact metals resulting in stable devices with high electron oncurrents. 76,93 In spite of the possibility of the presence of additional tunneling barriers and transport through multiple sub-bands, the on-state current has been used by Chen et al to estimate the Schottky barrier height of CNT-metal contacts for a large set of devices with different CNT diameters and metal work functions. 67 The Schottky barrier height is extracted by comparing the measured on-state currents to simulations which have the Schottky barrier height as a free parameter.…”
Section: A Measurements Of Schottky Barrier Heightsmentioning
confidence: 99%
“…The unique atomic and electronic structures of a semiconducting CNT allow the n-type ohmic contact be made to its conductance band by suitable low work function metal such as Sc 21 or Y, 22 and p-type ohmic contact to be made to the valence band by high work function metal, such as Pd. 23 Carefully low temperature experiments have been carried out and shown that these n-and p-type contacts may inject carriers without barrier into the semiconducting CNTs with moderate diameter between 1.5-3.0 nm, and the linear ohmic feature in the corresponding I-V characteristic persists down to extremely low temperature, e.g.…”
Section: Doping-free Fabrication and Performance Of Cnt Fetsmentioning
confidence: 99%
“…[101] More recently, close-to-perfect contacts to the tube's conduction band have been accomplished using scandium, rendering both p-and n-type SWCNT-FETs available. [102] The influence of the Schottky barriers can be reduced by selectively doping the contact regions, as has been realized on the basis of strong chemical charge-transfer between the tube and adsorbed molecules. [103] In close correspondence to graphene devices, a convenient method to estimate the Schottky-barrier height in a semiconduct- ing nanotube is SPCM performed under gate modulation.…”
Section: Carbon Nanotube-based Fetsmentioning
confidence: 99%