1999
DOI: 10.1134/1.1187789
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Distinctive features of the creation of radiation-induced defects in p-Si by photonassisted low-dose ion implantation

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“…Ion implantation is an important tool to create defects in solids (23)(24)(25). Oxygen-related point defects, defect complexes and vacancy creation are observed in different materials and its role in the modification on the physical properties is well emphasized (25).…”
Section: Radiation Effects and Defects In Solidsmentioning
confidence: 99%
“…Ion implantation is an important tool to create defects in solids (23)(24)(25). Oxygen-related point defects, defect complexes and vacancy creation are observed in different materials and its role in the modification on the physical properties is well emphasized (25).…”
Section: Radiation Effects and Defects In Solidsmentioning
confidence: 99%