Abstract— Liquid‐crystal (LC) alignment on SiOx films produced by ion‐beam sputtering deposition was comprehensively studied. The conditions for planar, tilted planar, homeotropic, and tilted homeotropic LC alignment of high uniformity were determined. The alignment photostability and aging issue are discussed. An original sputtering system based on the anode‐layer source excelling in high reliability and quality of sputtered coatings were used. Because this system can be easily scaled up, the alignment treatment of the large‐area alignment substrates, including those used in modern LCD manufacturing, can be realized. The advantages of the sputtering LC alignment technique, in comparison with its vapor‐deposition predecessor, are described.