Dispersion error of a beam splitter cube in white-light spectral interferometry

Hlubina, Petr; Luňáček, Jiří; Ciprián, Dalibor; Chlebus, R.

doi:10.2478/s11772-008-0040-1

Cited by 8 publications

(2 citation statements)

References 17 publications

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“…After analysis, there are two reasons for the above issue. First, there exists the influence of the effective thickness caused by the beam splitter prism [14], which will lead to a certain nonlinear phase. Second, there is a mismatch between the two objectives used in Linnik system, which will also lead to nonlinear phase errors.…”

Section: Film Standard Thickness Measurementmentioning

confidence: 99%

Single point Linnik white-light spectral microscopic interferometer for surface measurement

Guo¹,

Yuan²,

Chen³

et al. 2018

Surf. Topogr.: Metrol. Prop.

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According to the requirement for high precision surface measurement in complex situations, a single point Linnik type measuring system with long working distance is built based on white-light spectral interferometry. Five-step phase-shifting algorithm is used to extract accurate phase information in the measuring system. Several experiments are conducted to measure the absolute distance and film thickness, verifying the feasibility of the system. It has been achieved that the system can measure the surface form and film thickness with nanoscale accuracy.

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Section: Film Standard Thickness Measurementmentioning

confidence: 99%

Single point Linnik white-light spectral microscopic interferometer for surface measurement

Guo¹,

Yuan²,

Chen³

et al. 2018

Surf. Topogr.: Metrol. Prop.

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“…Most recently, knowledge of the effective thickness was used in employment of a new method for measuring a phase function of a thin-film structure. 9,10,16 In this paper, a white-light spectral interferometric technique employing a Michelson interferometer with same metallic mirrors is used to measure the effective thickness of a beamsplitter cube. We measured the thickness for four different beamsplitters that have two different orientations.…”

Section: Introductionmentioning

confidence: 99%

Variable effective thickness of beamsplitter cube and dispersion error in white-light spectral interferometry

Hlubina

Luňáček

Cyprian

et al. 2008

16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics

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A white-light spectral interferometric technique employing a Michelson interferometer with same metallic mirrors is used to measure the effective thickness of a beamsplitter cube. The thickness is measured for four different beamsplitters being in two different orientations. Moreover, it is revealed that the phase function of a thin-film structure measured by a similar interferometric technique depends on the path length difference adjusted in the Michelson interferometer. This phenomenon is due to a dispersion error of a beamsplitter cube, the effective thickness of which varies with the adjusted path length difference. A technique for eliminating the effect in measurement of the phase function is described. First, the effective thickness of the beamsplitter cube as a function of the path length difference is measured. Second, the phase function of the thin-film structure is measured for the same path length differences as those adjusted in the first case. In both cases, the phase is retrieved from the recorded spectral interferograms by using a windowed Fourier transform applied in the wavelength domain.

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White Light Interferometry

Schmit¹,

Pakuła²

2019

Handbook of Advanced Nondestructive Evaluation

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Dispersion error of a beam splitter cube in white-light spectral interferometry

Cited by 8 publications

References 17 publications

Single point Linnik white-light spectral microscopic interferometer for surface measurement

Single point Linnik white-light spectral microscopic interferometer for surface measurement

Variable effective thickness of beamsplitter cube and dispersion error in white-light spectral interferometry

White Light Interferometry

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